1986
DOI: 10.1016/0584-8547(86)80012-x
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Evaluation of argon metastable number densities in the inductively coupled plasma by continuum source absorption spectrometry

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Cited by 25 publications
(18 citation statements)
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“…Argon ion densities range between 10 14 cm − 3 and 10 15 cm − 3 [4]. Metastable atom densities range between 10 11 cm − 3 and 10 12 cm − 3 [27]. On balance, it appears that reaction (1) should be dominant.…”
Section: Densities In the Region Between 0-mm And 7-mm Downstream Fromentioning
confidence: 99%
“…Argon ion densities range between 10 14 cm − 3 and 10 15 cm − 3 [4]. Metastable atom densities range between 10 11 cm − 3 and 10 12 cm − 3 [27]. On balance, it appears that reaction (1) should be dominant.…”
Section: Densities In the Region Between 0-mm And 7-mm Downstream Fromentioning
confidence: 99%
“…However, it can be noted that the values found by most authors were located in the 10 9 -10 12 cm À3 range, just where the values found in our work are located. 7,34,38…”
Section: Resultsmentioning
confidence: 99%
“…In the literature many studies can be found that are devoted to the determination of argon metastable levels for different types of discharges and/or different experimental conditions. The external radiation sources used in these cases were spectral lamps, 4,7,10,16,[32][33][34] lasers, 15,27,[35][36][37] or even discharges. 4,38 One of the most important advantages of methods based on radiation absorption lies in their versatility, but these methods present a series of difficulties associated with using an external radiation source, which include the following:…”
Section: Self-absorption Methods For Metastable Population Measurementmentioning
confidence: 99%
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“…Hasegawa and Haraguchi, 6 Kawaguchi et al, 7 and Human and Scott 8 have measured the a-parameter for the lines emitted by samples of different elements placed in an argon ICP, finding that the Doppler broadening was predominant compared to the Lorentzian one (a Ͻ 1). Hart et al 29 have also determined experimentally the a value for different lines 4p-4s in an argon ICP. They used a completely different procedure based on the comparison of growth curves obtained theoretically and experimentally and which depended on a (used before by McGee and Winefordner 9 ), obtaining values lower than the unit and similar to those reported in this paper.…”
Section: Experimental Values Of the Damping Parametermentioning
confidence: 99%