Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer

Yamane, Daisuke; Konishi, Toshifumi; Safu, Teruaki; Toshiyoshi, Hiroshi; Sone, Masato; Masu, Kazuya; Machida, Katsuyuki

doi:10.1016/j.microrel.2016.09.018

Cited by 3 publications

(2 citation statements)

References 29 publications

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“…The third area is the optimization of the material of the stoppers. AK Delahunty et al [84] proposed a MEMS stopper made of metal in 2014, which increased the shock resistance of the structure to about 6000 g. In 2016, Y Daisuke et al [85] modeled and analyzed the shock resistance of a three-dimensional stopper structure based on a multilayer metal process. The impact resistance of this MEMS structure was about 11,000 g. In 2017, ST Chen et al [86] explored the use of air damping as a soft limiter for shock resistance.…”

Section: Stoppersmentioning

confidence: 99%

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Reliability of MEMS in Shock Environments: 2000–2020

Peng

You

2021

Micromachines

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The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.

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Section: Stoppersmentioning

confidence: 99%

“…[83].The third area is the optimization of the material of the stoppers. AK Delahunty et al[84]proposed a MEMS stopper made of metal in 2014, which increased the shock resistance of the structure to about 6000 g. In 2016, Y Daisuke et al[85] modeled and…”

mentioning

confidence: 99%