Electrical equivalent modeling of MEMS differential capacitive accelerometer

Mukhiya, Ravindra; Garg, Manu; Gaikwad, P. K.; Sinha, Soumendu; Singh, Anurag; Gopal, Ram

doi:10.1016/j.mejo.2020.104770

Cited by 13 publications

(6 citation statements)

References 25 publications

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“…LTSpice, PSpice, etc) [10][11][12]. This was successfully done by Veijola et al for the squeeze film damping of microelectromechanical systems (MEMS) devices [13][14][15]. The authors show that the simplified equivalent circuit (EQC) models are in a good agreement with the experimental data for the frequency response of MEMS devices.…”

Section: Introductionmentioning

confidence: 97%

Equivalent circuit model for the damping of micro-oscillators from molecular to viscous flow regime

Zengerle¹,

Joppich²,

Lensch³

et al. 2021

J. Micromech. Microeng.

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This paper presents an equivalent circuit (EQC) model for describing the damping mechanism of micro-oscillators from the molecular flow regime up to the viscous flow regime. The EQC model consists of two parallel lines, representing the molecular and the viscous damping mechanism, respectively. The molecular line consists of an R–L circuit, which describes the intrinsic losses and the transfer of kinetic energy from the micro-oscillator to the surrounding gas molecules. The viscous line is formed by a resistor and a newly introduced inductive constant phase element. These elements represent the thermoviscous losses and the collision processes in the viscous flow regime. This EQC model was applied to the first fundamental bending mode of an oscillator vibrating in seven different types of gases (He, Ne, Ar, N2, CO2, N2O, SF6) as well as to the first five bending modes for another type of oscillator vibrating in nitrogen gas, only. In all cases, variations of an adjustable gap width to a fixed plate in the range of 150–3500 µm were also taken into account. The results from the presented EQC model are found to be in excellent agreement with the experimental data. Additionally, the electronic components of the EQC can be correlated to real physical properties of the setup, i.e. to the viscosity and density of the gas, as well as to the adjusted gap width and to the resonance frequency of the micro-oscillator. This allows the prediction of the quality factor curve of an oscillator over a large pressure range in a simple way for various configurations, concerning gas type, gap width, and bending mode/resonance frequency. Based on these results, an optimization model and design rules for enhancing the quality factor were derived.

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Section: Introductionmentioning

confidence: 97%

Equivalent circuit model for the damping of micro-oscillators from molecular to viscous flow regime

Zengerle¹,

Joppich²,

Lensch³

et al. 2021

J. Micromech. Microeng.

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“…In sciences and engineering, the analysis of linear and non-linear differential equations is of great importance. Differential equations have appeared in the study of many topics as a robust and quite well-organized mathematical tool, such as circuit problems (Filobello-Nino et al, 2012;Vazquez-Leal et al, 2014Miranda-Villatoro et al, 2018;Popovi c, 2018;Mukhiya et al, 2020), infectious model (Doungmo Goufo et al, 2020;Calatayud et al, 2020aCalatayud et al, , 2020bYüzbas i and _ Ismailov, 2017;Faraz et al, 2020;Khan et al, 2012), soliton wave theory (Khan, 2018(Khan, , 2020a(Khan, , 2020bSaha Ray, 2018), fluid mechanics (Khan, 2013(Khan, , 2014(Khan, , 2011 and many more complex problems (Turkyilmazoglu, 2011;Calatayud et al, 2020aCalatayud et al, , 2020bSlota et al, 2019;He et al, 2019;He, 2019). Suggesting an effective approximate analytical solution to a non-linear differential equation is a challenging task.…”

Section: Introductionmentioning

confidence: 99%

“…The suggested method is best in its own kind as it gives solutions similar to the numerical method. As the theoretical analysis of the non-linear circuit analysis problems (Filobello-Nino et al, 2012;Vazquez-Leal et al, 2014Miranda-Villatoro et al, 2018;Popovi c, 2018;Mukhiya et al, 2020) has been given considerable attention, which is important for electrical engineering or electronics in the very same way as continuity and momentum equations for fluid mechanics. Circuit design plays a key role in developing successful industrial instruments, such as new electronic devices based on single-electron transistors and memristors.…”

Section: Introductionmentioning

confidence: 99%

Simple use of the Maclaurin series method for linear and non-linear differential equations arising in circuit analysis

Khan

Faraz

2021

COMPEL

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Purpose The purpose of this paper is to investigate the circuit analysis differential equations, which play an important role in the field of electrical and electronic engineering, and it was necessary to propose a very simple and direct method to obtain approximate solutions for the linear or non-linear differential equations, which should be simple for engineers to understand. Design/methodology/approach This paper introduces a simple novel Maclaurin series method (MSM) to propose an approximate novel solution in the area of circuit analysis for linear and non-linear differential equations. These equations describe the alternating current circuit of the resistor–capacitor, which evaluates the effect of non-linear current resistance. Linear and non-linear differential equations are evaluated as a computational analysis to assist the research, which reveals that the MSM is incredibly simple and effective. Findings Simulation findings indicate that the achieved proposed solution using the novel suggested approach is identical to the exact solutions mentioned in the literature. As the Maclaurin series is available to all non-mathematicians, this paper reflects mostly on theoretical implementations of the numerous circuit problems that occur in the field of electrical engineering. Originality/value A very simple and efficient method has been proposed in this paper, which is very easy to understand for even non-mathematicians such as engineers. The paper introduced a method of the Maclaurin series to solve non-linear differential equations resulting from the study of the circuits. The MSM mentioned here will be a useful tool in areas of physical and engineering anywhere the problem of the circuits is studied.

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“…They have been applied to the fields of automobile [ 1 , 5 ], healthcare [ 2 ], mobile devices [ 3 ], and electronic devices [ 4 ]. MEMS acceleration sensors are divided into capacitive [ 6 , 7 ], piezoelectric [ 8 , 9 ], piezoresistive [ 10 , 11 ], Hall effect [ 12 , 13 ], magnetoresistive [ 14 , 15 ] and heat transfer [ 16 , 17 ] types according to the sensing method used. The most common type of MEMS acceleration sensors are capacitive because of their simple structure, high productivity, linear stability, durability, and insensitivity to temperature [ 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

Lee

2020

Sensors

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This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to have a six layers structure with an air gap. Fabrication of the air gap and cantilever was enabled by coating and removing water-soluble PVA. The bottom electrode, the dielectric layer, and the sacrificial layer were formed using the roll-to-roll slot-die coating technique. The spacer, the top electrode, and the structural layer were formed by spin coating. Several kinds of experiments were conducted for characterization of the fabricated sensor samples. Experimental results show that accelerations of up to 3.6 g can be sensed with an average sensitivity of 0.00856 %/g.

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Electrical equivalent modeling of MEMS differential capacitive accelerometer

Cited by 13 publications

References 25 publications

Equivalent circuit model for the damping of micro-oscillators from molecular to viscous flow regime

Equivalent circuit model for the damping of micro-oscillators from molecular to viscous flow regime

Simple use of the Maclaurin series method for linear and non-linear differential equations arising in circuit analysis

Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

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