Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Barth, W.; Dębski, T.; Abedinov, N.; Ivanov, Tzvetan; Heerlein, H.; Volland, Burkhard E.; Gotszalk, Teodor; Rangelow, Ivo W.; Torkar, K.; Fritzenwallner, K.; Grabiec, P.; Studzińska, K.; Kostič, I.; Hudek, P.

doi:10.1016/s0167-9317(01)00558-5

Cited by 16 publications

(7 citation statements)

References 7 publications

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“…11,32,33 Ahmad Ahmad received the licentiate degree in electrical engineering from Tischrin-University, Latakia/Syria, in 1998, and the Diplom-Ingenieur degree in electrical engineering and information technology from Ilmenau University of Technology, Germany, in 2007. 11,32,33 Ahmad Ahmad received the licentiate degree in electrical engineering from Tischrin-University, Latakia/Syria, in 1998, and the Diplom-Ingenieur degree in electrical engineering and information technology from Ilmenau University of Technology, Germany, in 2007.…”

Section: Discussionmentioning

confidence: 99%

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Ahmad

Ivanov

Angelov³

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 08/05/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspxAbstract. The conventional optical lever detection technique involves optical components and their precise mechanical alignment. An additional technical limit is the weight of the optical system in cases where a topscanner is used with high-speed and high-precision metrology. An alternative represents the application of self-actuated atomic force microscopy (AFM) cantilevers with integrated two-dimensional electron gas (2-DEG) piezoresistive deflection sensors. A significant improvement in the performance of such cantilevers with respect to deflection sensitivity and temperature stability has been achieved by using an integrated Wheatstone bridge configuration. Due to employing effective crosstalk isolation and temperature drift compensation, the performance of these cantilevers was significantly improved. In order to enhance the speed of AFM measurements, we present an adaptive scanning speed procedure. Examples of AFM measurements with a high scanning speed (up to 200 lines∕s) committed to advanced lithography process development are shown. Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 08/05/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx Ahmad et al.: Fast atomic force microscopy with self-transduced, self-sensing cantilever Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 08/05/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx

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Section: Discussionmentioning

confidence: 99%

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Ahmad

Ivanov

Angelov³

et al. 2015

J. Micro/Nanolith. MEMS MOEMS

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“…Digital holographic microscopes are capable of distinguishing biological from Brownian motion (Nadeau et al , 2016 ; Serabyn et al , 2016 ; Bedrossian et al , 2017 ). Atomic force microscopes (AFM) can probe the biomechanical properties of cell candidates (Dorobantu et al , 2012 ) and have been flown for non-astrobiology science objectives (Barth et al , 2001 ). The Orbilander microscope is modeled after the requirements described by the Europa Lander Science Definition Team (ELSDT) without the AFM component (Hand et al , 2017 ) and is based on the Phoenix MECA microscope (Hecht et al , 2008 ).…”

Section: Traceability To the Science Payloadmentioning

confidence: 99%

Science Objectives for Flagship-Class Mission Concepts for the Search for Evidence of Life at Enceladus

et al. 2022

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Cassini revealed that Saturn's Moon Enceladus hosts a subsurface ocean that meets the accepted criteria for habitability with bio-essential elements and compounds, liquid water, and energy sources available in the environment. Whether these conditions are sufficiently abundant and collocated to support life remains unknown and cannot be determined from Cassini data. However, thanks to the plume of oceanic material emanating from Enceladus’ south pole, a new mission to Enceladus could search for evidence of life without having to descend through kilometers of ice. In this article, we outline the science motivations for such a successor to Cassini , choosing the primary science goal to be determining whether Enceladus is inhabited and assuming a resource level equivalent to NASA's Flagship-class missions. We selected a set of potential biosignature measurements that are complementary and orthogonal to build a robust case for any life detection result. This result would be further informed by quantifications of the habitability of the environment through geochemical and geophysical investigations into the ocean and ice shell crust. This study demonstrates that Enceladus’ plume offers an unparalleled opportunity for in situ exploration of an Ocean World and that the planetary science and astrobiology community is well equipped to take full advantage of it in the coming decades.

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“…Rangelow et al have shown arrays of 128 piezoresistive and self-actuated (by means of the bimetal effect) cantilever proximal probes, and the corresponding measurement and control system [97]. They also fabricated a piezoresistive 16-cantilever AFM probe array for space applications [98], which is the core of MIDAS (Micro-Imaging Dust Analysis System), one of the instruments in the orbiter spacecraft of the ESA Rosetta mission, which on 6 August 2014 became the first mission to rendezvous with a comet (67P/Churyumov-Gerasimenko) after a travel of 10 years, and will orbit it until the end of the mission in December 2015.…”

Section: Cantilevers For Scanning Probe Microscopymentioning

confidence: 99%

Piezoresistive cantilevers for nanomechanical sensing

Bausells

2015

Microelectronic Engineering

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Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Cited by 16 publications

References 7 publications

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Science Objectives for Flagship-Class Mission Concepts for the Search for Evidence of Life at Enceladus

Piezoresistive cantilevers for nanomechanical sensing

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