Evaluation Algorithm of Pupil Characteristic Parameters in Lithography Illumination System

Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners

“…In his doctoral thesis, Zeng Zongshun proposed an algorithm to calculate the distribution of spot positions according to the pupil distribution 4 .In addition, the preliminary analysis of the position relationship between subpupil and micromirror in MMA in theunpolarized state, but does not solve the problem of uneven energy of polarization performance caused by the tilt of light. Gan Yu elaborated an evaluation method of pupil characteristic parameters in his paper 5 . In this paper, based on the pupil characteristic parameter method, we propose a method of unpolarized state and polarization state, the polarized state and the energy balance of light, the polarized state and the energy balance of light.…”