Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners

Huang, Zhenxin; Yang, Zenghui; Zhu, Linglin; Zeng, Aijun; Huang, Huijie

doi:10.1117/12.3008130

AOPC 2023: Laser Technology and Applications; And Optoelectronic Devices and Integration 2023

DOI: 10.1117/12.3008130

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Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners

Zhenxin Huang,

Zenghui Yang,

Linglin Zhu

et al.

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Micro-mirror select and angle set algorithm of freeform pupil illumination systems in immersion scanners

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References 4 publications

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