Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

Lee, Chee-Leong; Gu, Erdan; Dawson, Martin D.; Friel, I.; Scarsbrook, G. A.

doi:10.1016/j.diamond.2008.01.011

Cited by 95 publications

(71 citation statements)

References 11 publications

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“…The advantage of this method is the simpler and faster processing exploiting quartz as both the handling substrate and mask material. In the next step, the diamond device layer was thinned to o500 nm using reactive ion etching based on an argon-chlorine (Ar/Cl) plasma 31 . This procedure is known to produce very uniform and smooth etches with resulting surface roughness well below 1 nm-rms.…”

Section: Resultsmentioning

confidence: 99%

Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

et al. 2014

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Diamond has gained a reputation as a uniquely versatile material, yet one that is intricate to grow and process. Resonating nanostructures made of single-crystal diamond are expected to possess excellent mechanical properties, including high-quality factors and low dissipation. Here we demonstrate batch fabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm and lateral dimensions up to 240 mm. Quality factors exceeding one million are found at room temperature, surpassing those of state-of-the-art single-crystal silicon cantilevers of similar dimensions by roughly an order of magnitude. The corresponding thermal force noise for the best cantilevers is B5 Á 10 À 19 N Hz À 1/2 at millikelvin temperatures. Single-crystal diamond could thus directly improve existing force and mass sensors by a simple substitution of resonator material. Presented methods are easily adapted for fabrication of nanoelectromechanical systems, optomechanical resonators or nanophotonic devices that may lead to new applications in classical and quantum science.

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Section: Resultsmentioning

confidence: 99%

Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

et al. 2014

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“…Therefore, we follow this step with another acid clean with the same conditions as before to remove surface contaminants from the polishing process, and perform another RIE etch again with 30min of Ar/Cl 2 and 30min of O 2 . This RIE etch is used to access a portion of the diamond that is clear of mechanical stress created by polishing, and to further average out the surface roughness via the ICP [19]. The final surface is seen in Fig.1(d) where the RMS surface roughness is ∼150-300pm, depending on the sample, for an area without any of the small circular defects.…”

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confidence: 99%

Superconducting nanowire single photon detector on diamond

Atikian

Eftekharian

Salim

et al. 2014

Applied Physics Letters

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Superconducting nanowire single photon detectors (SNSPDs) are fabricated directly on diamond substrates and their optical and electrical properties are characterized. Dark count performance and photon count rates are measured at varying temperatures for 1310nm and 632nm photons. The procedure to prepare diamond substrate surfaces suitable for the deposition and patterning of thin film superconducting layers is reported. Using this approach, diamond substrates with less than 300pm RMS surface roughness are obtained.Diamond has recently gained significant interest as a promising platform for on-chip high-performance photonic devices [1][2][3]. Diamond exhibits many favorable material properties such as a high refractive index (n=2.4), wide bandgap (5.5eV), and a large optical transmission range from the UV to the mid infrared. Diamond is also host to numerous defect color centers such as the nitrogen-vancancy (NV) center, that can be utilized as an optically addressable spin based memory, particularly interesting in the field of quantum information processing [4,5]. In addition, diamond has a relatively large Kerr non-linearity [6] (n 2 = 1.3 · 10 −19 m 2 /W) making it an attractive platform for on-chip nonlinear optics in the visible and infrared wavelengths [7]. An exciting application for utilizing this diamond non-linearity could allow for frequency conversion of photons generated by color centers in diamond, which typically emit in the visible range, to the telecom wavelengths [8]. This could enable transmission of quantum information and distribution of quantum entanglement [9, 10] over long distances, for the realization of quantum repeaters. Such an integrated diamond quantum photonics platform would benefit from the realization of high performance single photon detectors, with broadband photon sensitivity, that are integrated directly on the same diamond chip.Superconducting nanowire single photon detectors (SNSPDs) outperform other single photon detector technologies on several merits such as quantum efficiency [11], timing jitter, dark count rates, and broad spectral sensitivity [12,13]. SNSPDs typically consist of narrow width nanowires patterned into an ultrathin (4nm to 8nm) superconducting film, commonly made from niobium nitride or some derivative of [14]. The nanowires are current biased close to the critical current of the superconductor. When an incident photon is absorbed by the wire, a small resistive hotspot is formed generating a voltage pulse that can be subsequently amplified and measured [15]. Since the performance of SNSPDs is critically * loncar@seas.harvard.edu dependent on nanowire structural uniformity, it is crucial to have them deposited on smooth substrate surfaces to avoid constrictions that can have detrimental effects on detection efficiency [16].In this letter, we report NbTiN superconducting nanowires deposited directly on diamond substrates that exhibit promising single photon sensitivity. Specifically, we provide details of the fabrication procedure developed, resulting in ...

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“…We then etched the sample from the back-side to a thickness ≈ 3 µm with reactive ion etching (RIE, Unaxis shuttleline), using a combined ArCl 2 [31] and O 2 [19] process. On the thin diamond membrane, we fabricated an array of diamond nanopillars on the top-side by using electronbeam lithography and RIE as described in [19].…”

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confidence: 99%

A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres

et al. 2012

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Controllable atomic-scale quantum systems hold great potential as sensitive tools for nanoscale imaging and metrology [1][2][3][4][5][6]. Possible applications range from nanoscale electric [7] and magnetic field sensing [4][5][6]8] to single photon microscopy [1,2], quantum information processing [9], and bioimaging [10]. At the heart of such schemes is the ability to scan and accurately position a robust sensor within a few nanometers of a sample of interest, while preserving the sensor's quantum coherence and readout fidelity. These combined requirements remain a challenge for all existing approaches that rely on direct grafting of individual solid state quantum systems [4,11,12] or single molecules [2] onto scanning-probe tips. Here, we demonstrate the fabrication and room temperature operation of a robust and isolated atomic-scale quantum sensor for scanning probe microscopy. Specifically, we employ a high-purity, single-crystalline diamond nanopillar probe containing a single Nitrogen-Vacancy (NV) color center. We illustrate the versatility and performance of our scanning NV sensor by conducting quantitative nanoscale magnetic field imaging and near-field single-photon fluorescence quenching microscopy. In both cases, we obtain imaging resolution in the range of 20 nm and sensitivity unprecedented in scanning quantum probe microscopy.The NV center in diamond is a point-defect that offers the potential for sensing and imaging with atomic scale resolution. Sensitive nanoscale detection of various physical quantities is possible because the NV center forms a bright and stable single photon source [13] for optical imaging, and possesses a spin-triplet ground state which offers excellent magnetic [5] and electric [7] field sensing capabilities. The remarkable performance of the NV center in such spin-based sensing schemes, is the result of the long NV spin coherence time [14], combined with efficient optical spin preparation and readout [15], all at room temperature. In addition, NV centers can be positioned within nanometers of a diamond surface [16] and therefore in close proximity of a sample to maximize signal strengths and spatial resolution. In order to realize the full potential of these attractive features, we have developed a "scanning NV sensor" (Fig. 1a), which employs a diamond nanopillar as the scanning probe, with an individual NV center artificially created within a few nanometers of the pillar tip through ion implantation. Long NV spin coherence times (≈ 30 µs) are achieved as our devices are fabricated from high purity, single-crystalline bulk diamond [17]. Furthermore, diamond nanopillars are efficient waveguides for the NV fluorescence band [18], which yields record-high NV signal collection efficiencies for a scanning NV device. Fig. 1b shows a representative scanning electron microscope (SEM) image of a single-crystalline diamond scanning probe containing a single NV center. The preparation of such devices is based on recently developed tech- * These authors contributed equally to this work...

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Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

Cited by 95 publications

References 11 publications

Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

Superconducting nanowire single photon detector on diamond

A robust scanning diamond sensor for nanoscale imaging with single nitrogen-vacancy centres

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