Etched silicon vibrating sensor

Greenwood, J. C.

doi:10.1088/0022-3735/17/8/007

Cited by 118 publications

(28 citation statements)

References 3 publications

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“…It features a guaranteed accuracy of +0.075% and +0.1% stability for 24 months of operation [81]. The Druck device is based on a design by Greenwood [136] and consists of a bulk-micromachined pressure-sensitive diaphragm carrying two coupled torsional oscillator structures. The membrane chip is bonded under vacuum to a second silicon wafer containing the electrostatic drive and pick-up system.…”

Section: Pressure Sensorsmentioning

confidence: 99%

Micromachined Resonant Sensors— an Overview

Brand

Baltes

1998

Sensors Update

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Section: Pressure Sensorsmentioning

confidence: 99%

Micromachined Resonant Sensors— an Overview

Brand

Baltes

1998

Sensors Update

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“…Resonance micro-machined pressure sensors were first developed in the early 1980s by Greenwood (1984). The resonant sensing mechanism is based on containing a resonant structure in which its resonance frequency is a function of a mechanical quantity, such as pressure, strain, temperature, etc.…”

Section: Resonant Pressure Sensorsmentioning

confidence: 99%

A micro-capacitive pressure sensor design and modelling

Kubba

Hasson

Kubba

et al. 2016

J. Sens. Sens. Syst.

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Abstract. Measuring air pressure using a capacitive pressure sensor is a robust and precise technique. In addition, a system that employs such transducers lies within the low power consumption applications such as wireless sensor nodes. In this article a high sensitivity with an elliptical diaphragm capacitive pressure sensor is proposed. This design was compared with a circular diaphragm in terms of thermal stresses and pressure and temperature sensitivity. The proposed sensor is targeted for tyre pressure monitoring system application. Altering the overlapping area between the capacitor plates by decreasing the effective capacitance area to improve the overall sensitivity of the sensor ( C/C), temperature sensitivity, and built-up stresses is also examined in this article. Theoretical analysis and finite element analysis (FEA) were employed to study pressure and temperature effects on the behaviour of the proposed capacitive pressure sensor. A MEMS (micro electro-mechanical systems) manufacturing processing plan for the proposed capacitive sensor is presented. An extra-low power short-range wireless read-out circuit suited for energy harvesting purposes is presented in this article. The developed read-out circuitry was tested in terms of sensitivity and transmission range.

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“…12 The vital part of the sensor head was fabricated from a single piece of silicon, and consisted of pair of linked, flat, vibratable plates held above a diaphragm and coupled to it so that pressure changes across the diaphragm strained the plates and changed the resonant frequency of their vibrations. The whole structure was mounted against a patterned glass substrate by which electrostatic forces could be applied to drive the plates into vibration, and capacitance changes monitored to detect the vibration amplitude; electrical feedback was then used to keep the system on resonance.…”

Section: Electrically-powered Microresonator Sensorsmentioning

confidence: 99%

Optical microresonator sensor systems

Venkatesh

1988

J. Inst. Electron. Radio Eng. UK

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Over the past few years a number of advances have been made towards the development of a new type of optical sensor based on the activation and detection by optical means of resonant vibrations in simple mechanical devices. This paper describes three strands of technology-resonator sensing, optical fibre systems and silicon micromachiningthe judicious interweaving of which underlies the most promising of these advances; it then presents a review of the published work to date and ends with a personal view of possible future developments.

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Etched silicon vibrating sensor

Cited by 118 publications

References 3 publications

Micromachined Resonant Sensors— an Overview

Micromachined Resonant Sensors— an Overview

A micro-capacitive pressure sensor design and modelling

Optical microresonator sensor systems

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