Micromachined Resonant Sensors— an Overview

Brand, Oliver; Baltes, H.

doi:10.1002/1616-8984(199808)4:1<3::aid-seup3>3.0.co;2-t

Cited by 49 publications

(25 citation statements)

References 49 publications

(127 reference statements)

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“…In the second example we consider a multi-layered thin structure typical in MEMS used for the detection and the generation of ultrasound such as, for example in [50]. It consists of a silicon oxide and aluminum layer on the outer region, each 0.5 lm thick, and with a lateral dimension of 200 lm as depicted in Fig.…”

Section: Thermo-mechanical Structuressupporting

confidence: 42%

Adaptive error control in multi-physical thin-structure MEMS FE-simulation

Müller¹,

Korvink²

2004

Journal of Computational Physics

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Section: Thermo-mechanical Structuressupporting

confidence: 42%

Adaptive error control in multi-physical thin-structure MEMS FE-simulation

Müller¹,

Korvink²

2004

Journal of Computational Physics

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“…High accuracy resonant pressure sensors usually employ resonators such as resonant beams or tuning forks as resonant strain gauges to sense pressure-induced stresses in a diaphragm [1,2]. R.J. Cheng et al has reported a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm [3].…”

Section: Introductionsupporting

confidence: 42%

High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

Wang

Zhao

Han

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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This paper reports a high accuracy oil-filled MEMS absolute pressure sensor based on quartz crystal double-ended tuning fork (DETF) resonator, which is suitable for application in ocean, petroleum, meteorological, aerospace and spacecraft field, etc. The pressure sensing unit is mainly composed of DETF resonator, diaphragm and back cavity structure. These pieces are all fabricated by quartz crystal using MEMS process, and are bonded together as 'sandwich' structure to form the absolute pressure sensing unit using glass frit under low temperature and vacuum condition. This process could effectively eliminate the thermal stress effect and form the reference vacuum cavity. The isolated packaged pressure sensor is composed of corrugated stainless steel diaphragm, silicone oil, pressure sensing unit and ceramic base package. The experimental results show that the accuracy is up to ±0.033% FS in the pressure range 0~300 kPa over the temperature range −20 °C~+45 °C.

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“…MEMS can be applied to develop sensors for detecting different kinds of physical or chemical properties [2]. The monolithical integration of the mechanical transducer and readout circuitry obtaining a microelectromechanical system on chip allows the fabrication of the full sensor in a volume in the order of mm 3 .…”

Section: Introductionsupporting

confidence: 41%

<title>MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)</title>

et al. 2005

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A Micro Electro Mechanical System (MEMS) for mass detection is presented. It has been developed by the monolithic integration of the mechanical transducer with the CMOS control circuit. The sensor transducer consists on an array of four resonating cantilevers; oscillation is achieved by electrostatic excitation. The independent control on each cantilever of the arrays allows multiple sensing on a single device. The microresonators are fabricated on polysilicon in a compatibilized process with the front-end CMOS circuitry. The readout of the cantilevers oscillation is achieved by a current amplifier. Expected Mass resolution in air is 80 ag/Hz.

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Micromachined Resonant Sensors— an Overview

Cited by 49 publications

References 49 publications

Adaptive error control in multi-physical thin-structure MEMS FE-simulation

Adaptive error control in multi-physical thin-structure MEMS FE-simulation

High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

<title>MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)</title>

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