Abstract:Surface morphology of a single-crystalline 4H-silicon carbide (SiC) etched by chlorine trifluoride gas was studied over the wide temperature range of 570-1570 K at atmospheric pressure in a horizontal cold wall reactor. The etch rate of both the Si-face and C-face 4H-SiC at the substrate temperatures between 720 and 1570 K was simultaneously measured to be nearly flat at ca. 5 μm min -1 . The Si-face and C-face showed pitted surfaces at low temperatures; the pits tended to become small and shallow with the inc… Show more
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