Estimation of the long-term stability of piezoresistive LTCC pressure sensors by means of low-frequency noise measurements

Zarnik, Marina Santo; Sedláková, Vlasta; Belavič, Darko; Šikula, Josef; Majzner, Jiří; Sedlák, Petr

doi:10.1016/j.sna.2013.05.030

Cited by 21 publications

(11 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As showed in [16] the stability of the sensors' offset voltage and the sensitivity are related to the low-frequency noise of the output signal. A lower noise level corresponds to a better long-term stability while the sensors with higher noise of the output voltage may have poor long term stability.…”

Section: Ageing Due To Intrinsic Irregularitiesmentioning

confidence: 95%

“…Previous studies [16,17] have shown that the operating conditions in the regime of frequent overloading have non-negligible effects on the aging of such sensors. For efficient maintenance, accurate readings of such sensors including appropriate monitoring of the sensors performances and the operation conditions would be beneficial.…”

Section: Fig 2 Typical Response Of the 100-mbar Sensor Measured At mentioning

confidence: 99%

“…The situation is similar to that of mechanical parts / systems. Our previous study [16] showed how the offset and the sensitivity characteristics change due to the accelerated ageing with various pressure loads. This article interprets experimental results obtained for the 100-mbar sensors (such as in Fig.…”

Section: Ageing Due To Long-term Use and Overloadsmentioning

confidence: 99%

See 2 more Smart Citations

Sensors in Proactive Maintenance – A case of LTCC pressure sensors

Zarnik¹,

Novak²,

Papa³

2018

Eksploatacja i Niezawodność – Maintenance and Reliability

View full text Add to dashboard Cite

Sensors are a vital component part of any process-controlled system. Even though designed to properly operate at required conditions within the whole lifetime, all sensors exhibit some level of drift with time. When selecting the sensors for implementation in a system proactive maintenance their ageing in specific operating conditions should be considered as an important issue. Here we focus on thick-film piezoresistive sensors based on low temperature cofired ceramic (LTCC) and discuss their ageing in different regimes of operations. Frequent overloading and particularly with limit overpressures can result in observable drifts and unacceptable scattering from the calibrated characteristics. For the sensors operating in the water the overloads are even more critical. Moreover, under the regime with frequent overloads, some non-critical, intrinsic defects in the sensing structure, which normally do not affect the characteristics and are non-detectable by the output tests in serial production may develop into critical defects that shorten the sensor lifetime

show abstract

Section: Ageing Due To Intrinsic Irregularitiesmentioning

confidence: 95%

Section: Fig 2 Typical Response Of the 100-mbar Sensor Measured At mentioning

confidence: 99%

See 1 more Smart Citation

Sensors in Proactive Maintenance – A case of LTCC pressure sensors

Zarnik¹,

Novak²,

Papa³

2018

Eksploatacja i Niezawodność – Maintenance and Reliability

View full text Add to dashboard Cite

show abstract

“…Nevertheless, the stability of the key characteristics was found to be satisfactory for accurate measurements in a wide range of applications. A recent study of the long-term stability [115] showed that low-frequency noise measurements can reveal uncritical defects and imperfections in the thick-film resistors that cannot be detected by using conventional inspection and standard functional tests. The sensors with such defects are potentially unstable e.g.…”

Section: Piezoresistive Principlementioning

confidence: 99%

Overview on low temperature co-fired ceramic sensors

Jurków

Maeder

Dąbrowski

et al. 2015

Sensors and Actuators A: Physical

Self Cite

View full text Add to dashboard Cite

Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.

show abstract

“…Moreover, the noise spectroscopy give us integral information about the complete state of a device and may inform about faults in its design, quality of electrical contacts and conducting paths, applied manufacturing processes, long-term stability, etc. An increased level of noise or unusual shape of the noise spectra usually indicate failure mechanisms in particular devices [14][15][16][17][18]. Several authors showed that fluctuation analysis enables to extract a more selective response from the chemical sensors, [19][20][21][22][23][24], surface acoustic wave sensors, and resonant sensors [25,26].…”

Section: Introductionmentioning

confidence: 99%

Current Fluctuation Measurements of Amperometric Gas Sensors Constructed with Three Different Technology Procedures

Sedlák

Kuberský

Škarvada

et al. 2016

Metrology and Measurement Systems

Self Cite

View full text Add to dashboard Cite

Electrochemical amperometric gas sensors represent a well-established and versatile type of devices with unique features: good sensitivity and stability, short response/recovery times, and low power consumption. These sensors operate at room temperature, and therefore have been applied in monitoring air pollutants and detection of toxic and hazardous gases in a number of areas . Some drawbacks of classical electrochemical sensors are overcome by the solid polymer electrolyte (SPE) based on ionic liquids. This work presents evaluation of an SPE-based amperometric sensor from the point of view of current fluctuations. The sensor is based on a novel three-electrode sensor platform with solid polymer electrolytes containing ionic liquid for detection of nitrogen dioxide − a highly toxic gas that is harmful to the environment and presenting a possible threat to human health even at low concentrations. The paper focuses on using noise measurement (electric current fluctuation measurement) for evaluation of electrochemical sensors which were constructed by different fabrication processes: (i) lift-off and drop-casting technology, (ii) screen printing technology on a ceramic substrate and (iii) screen printing on a flexible substrate.

show abstract

Estimation of the long-term stability of piezoresistive LTCC pressure sensors by means of low-frequency noise measurements

Cited by 21 publications

References 14 publications

Sensors in Proactive Maintenance – A case of LTCC pressure sensors

Sensors in Proactive Maintenance – A case of LTCC pressure sensors

Overview on low temperature co-fired ceramic sensors

Current Fluctuation Measurements of Amperometric Gas Sensors Constructed with Three Different Technology Procedures

Contact Info

Product

Resources

About