Estimation of Plasma Density by Surface Plasmons for Surface-Wave Plasmas

Abstract

An estimation method of plasma density based on surface plasmons theory for surface-wave plasmas is proposed. The number of standing-wave is obtained directly from the discharge image, and the propagation constant is calculated with the trim size of the apparatus in this method, then plasma density can be determined with the value of 9.1 × 1017 m−3. Plasma density is measured using a Langmuir probe, the value is 8.1 × 1017 m−3 which is very close to the predicted value of surface plasmons theory. Numerical simulation is used to check the number of standing-wave by the finite-difference time-domain (FDTD) method also. All results are compatible both of theoretical analysis and experimental measurement.

Microwave Plasma-Assisted Catalytic Reduction of NO by Active Coke over Transition-Metal Oxides

“…The microwave discharge plasma of this experiment belongs to a plasma jet excited by the electromagnetic surface wave plasma, and its propagation constant at the interface between the medium and the plasma can be expressed by the following formula where ε p and ε d are the relative dielectric constants of the plasma and dielectric, respectively, and k 0 is the wave number in free space. It can be seen that the higher the dielectric constant of the medium, the stronger the electromagnetic surface wave propagation ability and the higher the plasma intensity.…”

“…The microwave discharge plasma of this experiment belongs to a plasma jet excited by the electromagnetic surface wave plasma, 56 and its propagation constant at the interface between the medium and the plasma can be expressed by the following formula 57 ε ε…”

Research progress on atmospheric pressure lower-power microwave plasma sources and their application prospects

“…[20][21][22][23] . 综述文献 [20][21][22][23][24][25][26][27][28]发现, 大气压微波放电的流 体模拟, 主要以110 GHz高频微波等离子体为研究对 象 [20][21][22][23] , 对于2.45 GHz微波放电的流体模拟, 主要模 拟了低气压SWP源 [24][25][26][27][28] . 关于微波放电的粒子模拟 (PIC/MCC), 之前研究主要是对ECR低气压等离子体 的模拟 [29,30] .…”

Effect of wave-mode conversion device on production of large-area rectangular overdense surface-wave plasmas at the gas pressure about 100 Pa

“…Therefore, the development and application researches of the large-scale overdense SWP have attracted the unprecedented attention and the current study focus on the spatial uniformity and the temporal stability in large area. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18] To address the above concerns, a lot of planar-type SWP sources have been optimized. As for these sources, the uniformity of plasma below the dielectric slab is one of the most important factors.…”

“…IV. Figure 1 show the schematic of the plasma source, which has been reported in our previous works, [16][17][18][19] but its energy coupling parts in the present setup will be reset for studying the influences of different wave-mode conversion devices on plasma heating. The cavity dimensions are x =0-46 cm, y =0-22 cm, and z =0-30 cm.…”