Effect of wave-mode conversion device on production of large-area rectangular overdense surface-wave plasmas at the gas pressure about 100 Pa

Abstract

In this paper, the wave-mode conversion devices with three different structures have been devised for plasma heating. Surface-wave plasma ͑SWP͒ discharge analysis with or without considering the collision loss is presented theoretically. The comparative discharge experiments have been operated for obtaining the uniform stable microwave discharges. When a specially designed microwave appliance is selected as the proposed wave-mode conversion device, the discharges driven by resonant excitation with surface wave ͑SW͒ have yielded plasmas with density of about 10 18 m −3 at the gas pressure larger than 10 Pa. By comparing the results, the production of large-area uniform stable overdense SWP is attributed to the resonant excitation with SW evenly on the whole dielectric-plasma interface by the application of the specially designed wave-mode conversion device.

Filamentary streamer discharges in argon at atmospheric pressure excited by surface plasmon polaritons

“…Many trials are normally performed or empirical methods are used to obtain optimal uniformity. [14][15][16][17][18][19] In air, an important factor is the efficient discharging of the system because of the difficulty in ionizing at higher gas pressures. 1,[6][7][8][9] A possible means to obtain efficient discharge control is to use a plasma-dielectric resonator, i.e., the surfatron, the surfaguide, and the waveguide surfatron.…”

Electromagnetic interaction between local surface plasmon polaritons and an atmospheric surface wave plasma jet

“…On the other hand, the real parts of the E field peak at lower pressures but decrease solely at atmosphere. As in our pre-035202-5 vious analysis, [28,29] the real parts of the x-direction E field can convert to electron plasma waves (ω 2 =ω 2 p + 3υ 2 th k 2 , υ th is the electron thermal velocity) at the resonant point. After this energy conversion, the electron plasma waves propagate in the discharge domain with energy damping by collisions (Ohmic heating) or the Landau damping process.…”

Character Diagnosis for Surface-Wave Plasmas Excited by Surface Plasmon Polaritons

“…The quartz plate (dielectric permittivity ε d = 3.78), 44 cm long, 20 cm wide and 1.4 cm thick, is located between the diffraction grating and the plasma layer. A specially designed wave-mode conversion device is placed on the top of the quartz plate [10] . Microwave power through a rectangular waveguide (R22) is provided to the resonant chamber by a 2.45 GHz magnetron with the input power varied from 0.1 kW to 1 kW.…”