Estimation of keV submicron ion beam width using a knife-edge method

Ishii, Yasuyuki; Isoya, A.; Kojima, Takuji; Arakawa, Kazuo

doi:10.1016/s0168-583x(03)01370-3

Cited by 20 publications

(10 citation statements)

References 5 publications

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“…The standard way of measuring an electron beam profile is via edge resolution analysis where signal strength is collected as the electron beam scans along an atomically sharp edge (Rishton, 1984). Unfortunately, this method is problematic for focused ion beams because the ion beam will sputter away the sharp edge as it scans across it, skewing the detected signal (Harriott, 1990; Ishii et al, 2003; Postek et al, 2010). Another way to measure beam profile is to sputter ion beam spot-sized holes, called beam burns, into a diagnostic material such as Si (Tan et al, 2012), fill the beam burn with deposition, use the FIB to cut a cross-section of the beam burn, and then measure its profile in cross section in the FIB or TEM (Greenzweig et al, 2016).…”

Section: Discussionmentioning

confidence: 99%

Using Xe Plasma FIB for High-Quality TEM Sample Preparation

Vitale

Sugar

2022

Microsc Microanal

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A direct comparison between electron transparent transmission electron microscope (TEM) samples prepared with gallium (Ga) and xenon (Xe) focused ion beams (FIBs) is performed to determine if equivalent quality samples can be prepared with both ion species. We prepared samples using Ga FIB and Xe plasma focused ion beam (PFIB) while altering a variety of different deposition and milling parameters. The samples’ final thicknesses were evaluated using STEM-EELS t/λ data. Using the Ga FIB sample as a standard, we compared the Xe PFIB samples to the standard and to each other. We show that although the Xe PFIB sample preparation technique is quite different from the Ga FIB technique, it is possible to produce high-quality, large area TEM samples with Xe PFIB. We also describe best practices for a Xe PFIB TEM sample preparation workflow to enable consistent success for any thoughtful FIB operator. For Xe PFIB, we show that a decision must be made between the ultimate sample thickness and the size of the electron transparent region.

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Section: Discussionmentioning

confidence: 99%

Using Xe Plasma FIB for High-Quality TEM Sample Preparation

Vitale

Sugar

2022

Microsc Microanal

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“…Line scans were performed perpendicular to the ion beam axis. Scanning the primary ion beam along a straight edge object allows the beam diameter to be measured, provided that the measurement step, which is defined by the pixel size, is much smaller …”

Section: Methodsmentioning

confidence: 99%

“…Scanning the primary ion beam along a straight edge object allows the beam diameter to be measured, provided that the measurement step, which is defined by the pixel size, is much smaller. [49,50] Mass spectrometry imaging On a rat cerebellum section, images in both negative and positive ion mode were acquired to evaluate each acquisition mode. The desired result is to distinguish Purkinje cells, which are very small structures present in the tissue.…”

Section: Tof-simsmentioning

confidence: 99%

Time‐of‐flight secondary ion mass spectrometry imaging of biological samples with delayed extraction for high mass and high spatial resolutions

Vanbellingen

Elie

Eller

et al. 2015

Rapid Comm Mass Spectrometry

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RationaleIn Time‐of‐Flight Secondary Ion Mass Spectrometry (TOF‐SIMS), pulsed and focused primary ion beams enable mass spectrometry imaging, a method which is particularly useful to map various small molecules such as lipids at the surface of biological samples. When using TOF‐SIMS instruments, the focusing modes of the primary ion beam delivered by liquid metal ion guns can provide either a mass resolution of several thousand or a sub‐µm lateral resolution, but the combination of both is generally not possible.MethodsWith a TOF‐SIMS setup, a delayed extraction applied to secondary ions has been studied extensively on rat cerebellum sections in order to compensate for the effect of long primary ion bunches.ResultsThe use of a delayed extraction has been proven to be an efficient solution leading to unique features, i.e. a mass resolution up to 10000 at m/z 385.4 combined with a lateral resolution of about 400 nm. Simulations of ion trajectories confirm the experimental determination of optimal delayed extraction and allow understanding of the behavior of ions as a function of their mass‐to‐charge ratio.ConclusionsAlthough the use of a delayed extraction has been well known for many years and is very popular in MALDI, it is much less used in TOF‐SIMS. Its full characterization now enables secondary ion images to be recorded in a single run with a submicron spatial resolution and with a mass resolution of several thousand. This improvement is very useful when analyzing lipids on tissue sections, or rare, precious, or very small size samples. © 2015 The Authors. Rapid Communications in Mass Spectrometry published by John Wiley & Sons Ltd.

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“…Currently, knife-edge (Ishii et al, 2003;Wright et al, 1992) and charge-coupled device (CCD) techniques are used to measure beam widths. Knife edge techniques are capable of achieving high resolution depending on the edge shape.…”

Section: Introductionmentioning

confidence: 99%

Measurement Method and System of Optical Fiber-Based Beam Width Using a Reflective Grating Panel

Lee¹,

Jang²,

Kim³

et al. 2011

International Journal of Aeronautical and Space Sciences

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An optical fiber-based beam width measurement technique is presented. The proposed system can be applied to the optical fiber industry in applications such as lensed fiber, optical fiber based laser beam source, and fiber optic sensor. The measurement system is composed of optical fiber, which is used as a transceiver, and a single grating panel which consists of a multi-reflection area with an even non-reflection area. The grating panel is used to vary the reflected light. When the widths of the reflection area and non-reflection area are larger than the optical beam width, the reflected light is varied at the interface between the reflection area and the non-reflection area by the movement of the grating panel. Experiments were conducted in order to verify the feasibility of the proposed technique. Multi-mode fiber combined with a collimator was selected as an emitter and a receiver, and the beam width measurement system was contrived. Subsequently, the proposed method and the system were verified by comparing the experimental results with the results of the conventional charge-coupled device technique.

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Estimation of keV submicron ion beam width using a knife-edge method

Cited by 20 publications

References 5 publications

Using Xe Plasma FIB for High-Quality TEM Sample Preparation

Using Xe Plasma FIB for High-Quality TEM Sample Preparation

Time‐of‐flight secondary ion mass spectrometry imaging of biological samples with delayed extraction for high mass and high spatial resolutions

Measurement Method and System of Optical Fiber-Based Beam Width Using a Reflective Grating Panel

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