Estimating the effective quality factor of a rotary comb-drive microresonator based on a non-classical theory

Ghanbari, Mina; Rezazadeh, Ghader

doi:10.1007/s00542-020-05176-y

Cited by 5 publications

(2 citation statements)

References 43 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The thermoelastic coupling term in the heat conduction equation is so small and usually neglected in practice 44 . It is important in many applications, such as thermal shocks 45 , 46 , ultrafast laser heating in the thermal processing of materials 47 , 48 , modeling of the vibration of resonant microelectromechanical systems (MEMS) 49 – 52 , and dynamic crack propagation 53 . Therefore, the thermoelastic effect should be taken into account in the mentioned application.…”

Section: Governing Equationsmentioning

confidence: 99%

Thermo-vibrational analyses of skin tissue subjected to laser heating source in thermal therapy

Ghanbari

Rezazadeh

2021

Sci Rep

Self Cite

View full text Add to dashboard Cite

Laser-induced thermal therapy, due to its applications in various clinical treatments, has become an efficient alternative, especially for skin ablation. In this work, the two-dimensional thermomechanical response of skin tissue subjected to different types of thermal loading is investigated. Considering the thermoelastic coupling term, the two-dimensional differential equation of heat conduction in the skin tissue based on the Cattaneo–Vernotte heat conduction law is presented. The two-dimensional differential equation of the tissue displacement coupled with the two-dimensional hyperbolic heat conduction equation in the tissue is solved simultaneously to analyze the thermal and mechanical response of the skin tissue. The existence of mixed complicated boundary conditions makes the problem so complex and intricate. The Galerkin-based reduced-order model has been utilized to solve the two-sided coupled differential equations of vibration and heat transfer in the tissue with accompanying complicated boundary conditions. The effect of various types of heating sources such as thermal shock, single and repetitive pulses, repeating sequence stairs, ramp-type, and harmonic-type heating, on the thermomechanical response of the tissue is investigated. The temperature distribution in the tissue along depth and radial direction is also presented. The transient temperature and displacement response of tissue considering different relaxation times are studied, and the results are discussed in detail.

show abstract

Section: Governing Equationsmentioning

confidence: 99%

Thermo-vibrational analyses of skin tissue subjected to laser heating source in thermal therapy

Ghanbari

Rezazadeh

2021

Sci Rep

Self Cite

View full text Add to dashboard Cite

show abstract

“…Up to now, not much work has been carried out to study and refine the geometry of flexure hinges to accurately mimic an ideal rotary joint in applications involving rotary comb-drives. For example, placing a linear beam as a flexible joint [47][48][49][50][51] is largely different to placing a curved beam [52], and it produces significant changes in the motion of the rigid parts; other crucial parameters involved in the design are the length and width of the flexure beam and its position on the motion plane [53].…”

Section: Introductionmentioning

confidence: 99%

On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry

Buzzin,

Giannini,

Bocchetta

et al. 2023

Micromachines

View full text Add to dashboard Cite

This paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromechanical behavior of a chosen rotary device is assessed by studying the rotation of the end effector, the motion of the comb-drive mobile fingers, the actuator’s maximum operating voltage, and the stress sustained by the flexure when the flexure’s shape, length, and width change. The results are compared with the behavior of a standard revolute joint. Outcomes demonstrate that a linear flexible beam cannot perfectly replace the revolute joint as it induces a translation that strongly facilitates the pull-in phenomenon and significantly increases the risk of ruptures of the comb-drives. On the other hand, results show how curved beams provide a motion that better resembles the revolute motion, preserving the structural integrity of the device and avoiding the pull-in phenomenon. Finally, results also show that the end effector motion approaches most precisely the revolute motion when a fine tuning of the beam’s length and width is performed.

show abstract

Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor

2023

View full text Add to dashboard Cite

Estimating the effective quality factor of a rotary comb-drive microresonator based on a non-classical theory

Cited by 5 publications

References 43 publications

Thermo-vibrational analyses of skin tissue subjected to laser heating source in thermal therapy

Thermo-vibrational analyses of skin tissue subjected to laser heating source in thermal therapy

On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry

Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor

Contact Info

Product

Resources

About