ESR Measurements of HOPG Irradiated with Highly Charged Ions

Nishida, N.; Betsumiya, Koji; Sakurai, Minoru; Sakurai, Takahiro; Terui, Toshifumi; Honda, Shinya

doi:10.1380/ejssnt.2018.356

Cited by 5 publications

(2 citation statements)

References 15 publications

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“…We have developed an electron beam ion source at Kobe University (called Kobe EBIS) to produce HCIs and have performed various studies on the interaction of HCIs with surfaces. [6][7][8][9][10][11][12] The fluence of incident HCIs used in these experiments was in the range of 10 12 -10 14 ions/cm 2 . We have previously reported on the emission of Balmer lines that are induced by the irradiation of a surface with HCIs.…”

Section: Introductionmentioning

confidence: 99%

Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions

Nishida

Sakurai

Kato

et al. 2020

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Visible light and secondary ions emitted from various sample surfaces (Si, HOPG, Cu, and Teflon) were observed after irradiation with highly charged ions (HCIs). HCIs were produced using an electron beam ion source (Kobe EBIS) at Kobe University. Visible emissions were detected using a liquid nitrogen cooled CCD detector. The mass spectrum of secondary ions was obtained using a quadrupole mass analyzer. The major constituent in both light and secondary ion emissions was hydrogen. Balmer lines were the dominant form of light emission as observed from spectra, and proton signals were the most intense peaks in SIMS spectra. The emission intensity of Balmer light and the proton signal intensity (as observed from the SIMS spectrum) both increased as the charge state of the incident HCI increased. Both intensities were roughly proportional to the third to fourth power of the charge state. Spatial distribution of Balmer light was measured and the kinetic energy of hydrogen sputtered from the surface was estimated to be ∼20 eV. The SIMS measurement results for the Teflon sample demonstrate the advantage of using SIMS with an HCI probe for detecting electronegative elements.

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Section: Introductionmentioning

confidence: 99%

Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions

Nishida

Sakurai

Kato

et al. 2020

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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“…14) We also investigated magnetic modification on a graphite surface by electron spin resonance. 13,14,16) A carbon nanotube is a promising material for quantum dot (QD)-based nanodevices and circuits. 17) A multi-wall carbon nanotube (MWNT) has advantages over single wall carbon nanotubes owing to its robustness against resist processes, metallic transport behavior, and low contact resistance at metal-MWNT interfaces even at the liquid He temperature.…”

Section: Introductionmentioning

confidence: 99%

Electric characteristics of multi-walled carbon nanotubes irradiated with highly charged ions

Nishida

Hori

Sakurai

et al. 2019

Jpn. J. Appl. Phys.

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The electric characteristics of individual multi-wall carbon nanotubes (MWNTs) irradiated with highly charged ions were evaluated. Each MWNT was located on a highly doped Si substrate with a source/drain contact, forming a back-gate FET configuration. We used highly charged Ar ions (Ar 8+ , Ar 11+ , and Ar 14+ ) extracted from an electron beam ion source. We measured the current-voltage curves of the MWNTs irradiated at fluences in the 10 11 -10 13 cm −2 range. The Ar 8+ irradiation caused a 10% increase in the resistivity at room temperature at a fluence of 6 × 10 11 cm −2 . The resistivity at room temperature for the MWNT samples with a high fluence of 10 13 cm −2 reached values higher than five times the original values. The current-voltage characteristics at low temperature became nonlinear and Coulomb oscillations were observed in the gate voltage dependence of the drain current. One of the samples exhibited Coulomb diamond characteristics particular to single quantum dot at 1.6 K.

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Characteristics of highly charged ions produced at Kobe EBIS under modulated operation

et al. 2019

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The electron beam ion source (Kobe EBIS) has been developed to perform modification of surfaces using highly charged ions (HCIs) at the Kobe University, Japan. Recent study revealed that periodic intermission of electron beam improves charge state distribution of extracted ions. The period of intermission is in the order of 100 ms, and the width of beam‐off time is 1 ms or less. This operational mode (pulse mode) makes it possible to produce Ar15+ to Ar17+ effectively, whereas the charge is limited less than 14+ under the ordinary operational mode with direct current (DC) electron beam. A spike of HCIs with a peak current in the order of nA is also observed at each moment of electron beam off. The measurement of the time evolution of Ar16+ intensity around the timing of mode change revealed that the intensity of extracted Ar16+ changes slowly after mode change with a time constant of few seconds.

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ESR Measurements of HOPG Irradiated with Highly Charged Ions

Cited by 5 publications

References 15 publications

Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions

Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions

Electric characteristics of multi-walled carbon nanotubes irradiated with highly charged ions

Characteristics of highly charged ions produced at Kobe EBIS under modulated operation

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