Abstract:The electron beam ion source (Kobe EBIS) has been developed to perform modification of surfaces using highly charged ions (HCIs) at the Kobe University, Japan. Recent study revealed that periodic intermission of electron beam improves charge state distribution of extracted ions. The period of intermission is in the order of 100 ms, and the width of beam‐off time is 1 ms or less. This operational mode (pulse mode) makes it possible to produce Ar15+ to Ar17+ effectively, whereas the charge is limited less than 1… Show more
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