Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes

Weinberg, Marc S.; Kourepenis, A.

doi:10.1109/jmems.2006.876779

Cited by 244 publications

(118 citation statements)

References 16 publications

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“…Electrical coupling is one of the major error sources for a MEMS gyroscope, which is induced by the direct coupling from the drive combs to the sense combs through the parasitic capacitances [1][2]. It will bring about the non-ideal anti-resonance at the amplitude-frequency responses of drive mode and sense mode, which deteriorates the performance and affects the reliability of the closed loop system.…”

Section: Introductionmentioning

confidence: 99%

Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control

Huang

Zhao

et al. 2016

MATEC Web Conf.

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Abstract. This paper has proposed a novel force rebalance control method for a MEMS gyroscope using ascending frequency drive and generalized PI control. Theoretical analyses of ascending frequency drive and force rebalance control methods are illustrated in detail. Experimental results demonstrate that the electrical anti-resonant peaks are located at the frequency responses in the RFD system, which seriously deteriorates the original response characteristics. However, they are eliminated in the AFD system, and the electrical coupling signal is also suppressed. Besides, as for the force rebalance control system, the phase margins approximate to 60deg, gain margins are larger than 13dB, and sensitivity margins are smaller than 3.2dB, which validates the control system is stable and robust. The bandwidth of the force rebalance control system is measured to be about 103.2Hz, which accords with the simulation result. The bias instability and angle random walk are evaluated to be 1.65deg/h and 0.06deg/¥h, respectively, which achieves the tactical level.

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Section: Introductionmentioning

confidence: 99%

Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control

Huang

Zhao

et al. 2016

MATEC Web Conf.

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“…Within them, the use of Micro-Electro-Mechanical Systems (MEMS) is increasingly extended because of their cost, size, robustness and power consumption. However, the effectiveness of the AIS algorithms is compromised by using them when there is a null drift along the time, which is a very common issue mainly in gyroscopes 25,26 . For a standard crane application, this major drawback could be avoided with a frequent time-basis calibration of the gyroscope, but it is not a feasible solution.…”

Section: Introductionmentioning

confidence: 99%

Modified adaptive input shaping for maneuvering cranes using a feedback MEM gyroscope with null drift

Fontanet

Cardona

Català

2015

Int. J. Precis. Eng. Manuf.

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This paper presents an adaptive algorithm to reduce residual vibrations when the feedback sensor used has the drawback of having null drift along the time. The adaptive approaches are useful to deal with large variations of the system parameters at each maneuver, such as it occurs in cranes. For the feedback sensor, the use of inertial measurement units such as Micro-Electro-Mechanical Systems (MEMS) is increasingly extended because of their cost, size, robustness and power consumption. However, the effectiveness of the adaptive input shaping algorithms is compromised because of this drift, which is a commonly raised issue in this kind of devices. For a standard crane application, this major drawback could be avoided with a frequent time-basis calibration of the sensor, but it is not a feasible solution. The study presented in this manuscript focuses on the development of an automatic compensation of this drift to obviate such frequent calibrations. It is based on a non-asymptotic algebraic identification technique, which has the advantage of not requiring initial conditions and having a short convergence time. The new formulation uses the Zero-Vibration (ZV) input shaper technique, and the null drift is added to the algorithm as a new parameter to be identified. The proposed method has been particularized for single maneuvers of cranes with a gyroscope as feedback sensor, in a real time scenario. Experimental results show the efficacy of the method with its application to a scaled crane test platform. P R E -P R I N T V E R S I O N

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“…6 In order to enhance the performance of the quartz microgyroscope, most academic organizations studying the microgyroscope mainly focus on the improvements in material, fabrication and structural design. [7][8][9][10] Commonly, the quartz microgyroscope works on the basis of the vibrative microstructure, so research on the vibration characteristics has become a key point in quartz microgyroscope research. To date, the vibration characteristics of most quartz microgyroscopes have been analysed using the theoretical analysis of mathematics and mechanics.…”

Section: Introductionmentioning

confidence: 99%

Vibration characteristic analysis method for the quartz microgyroscope based on the admittance circle

et al. 2014

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The vibration characteristic analysis method for a quartz microgyroscope based on the admittance circle is reported in this paper. Admittance theory is introduced and the admittance circle principle is analysed to study the vibration characteristics of the quartz microgyroscope. The prototype gyroscope was fabricated by micro-electromechanical systems (MEMS) technology. The admittance and phase diagram of the work mode were obtained by vibration mode test systems. Then the admittance circle of the work mode was drawn, and the parameter identification of the transfer function between the voltage and current was completed to analyse the vibration characteristics. Therefore, the vibration characteristic analysis method based on the admittance circle can be used to build the transfer function of the quartz microgyroscope, which is helpful for the design of a high performance quartz microgyroscope.

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Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes

Cited by 244 publications

References 16 publications

Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control

Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control

Modified adaptive input shaping for maneuvering cranes using a feedback MEM gyroscope with null drift

Vibration characteristic analysis method for the quartz microgyroscope based on the admittance circle

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