Vibration characteristic analysis method for the quartz microgyroscope based on the admittance circle

Wang, Haoxu; Dong, Pinliang; Xie, Longhan; Wu, Xuezhong

doi:10.1063/1.4867341

Cited by 8 publications

(2 citation statements)

References 16 publications

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“…A straight line is drawn perpendicular to the conductive axis. The intersection frequencies are f 1 and f 2 [ 17 , 18 , 19 ]. Then, using the corresponding distances and frequencies from Figure 2 , the dynamic inductance and parallel capacitance can be determined.…”

Section: Analysis Of the Equivalent Circuit And Principle Of A Piementioning

confidence: 99%

Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

et al. 2017

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A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacoustic spectroscopy is performed to detect oil-soluble gas in transformers, a micro-cantilever beam can be used to detect gas content. The dynamic characteristics of piezoelectric bimorph beams, such as resonant frequency, are important indexes in the applications of these beams. The equivalent circuit model for a piezoelectric bimorph beam is examined in this study and an admittance test is performed on the beam to accurately, quickly, and economically measure and analyze its dynamic characteristics. Then, the least squares method is applied to obtain the characteristic curves of the admittance circle, amplitude frequency, and phase frequency; identify the dynamic characteristics of the piezoelectric bimorph beam (e.g., resonant frequency); and determine the parameters of the equivalent circuit. The resonant frequency of the piezoelectric bimorph beam is 207.67 Hz based on the result of the admittance circle test, which is basically consistent with the results of microscope image method (i.e., 207.85 Hz) and the theoretical calculation (i.e., 222.03 Hz). This finding proves the validity of the proposed test method. This method cannot only improve the detection speed of piezoelectric bimorph beams, but can also provide a fast detection strategy for testing the characteristics of such beams during photoacoustic spectroscopy.

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Section: Analysis Of the Equivalent Circuit And Principle Of A Piementioning

confidence: 99%

Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

et al. 2017

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“…Recently, microelectromechanical systems (MEMS) technology has enabled the miniaturization and massproduction of gyroscopes which exhibit the characteristics of small volume, low power consumption, high reliability and easy integration. [1][2][3][4][5] Having been widely used in the fields of consumer electronics, vehicle navigation, aircraft control, missile precision guidance, etc., 1,[6][7][8][9] it is gaining increasing attention from researchers.…”

Section: Introductionmentioning

confidence: 99%

A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

et al. 2017

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This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW) is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements.

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