2010
DOI: 10.4028/www.scientific.net/kem.443.675
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Erosion Mechanism of Ultrasonic Vibration Abrasive Waterjet in Micro Machining

Abstract: In this paper, a study on erosion mechanism of Ultrasonic Vibration Abrasive Waterjet is presented. Theoretical analysis of the total effective erosion kinetic energy of UVAWJ is performed. By using a UVAWJ machining system with an Ultrasonic Vibration Power Workbench, the comparative experiment is conducted. The erosion surfaces of the single crystal silicon substrate were measured by Optical Profiler and observed with Scanning Electron Microscope. The material removal mechanisms are discussed. It is conclude… Show more

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Cited by 4 publications
(5 citation statements)
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“…There have been numerous reported works where ultrasonic vibration assistance is employed to improve the machining process. Vibration has also been used to assist microjet machining process [50,51] although the mechanisms beyond which the vibration affects the machining process and performance may be different from those in traditional machining where solid tools are used [52,53]. In a recent study at the authors' laboratory, ultrasonic vibration of 20 kHz was applied perpendicularly on the target material surface with the amplitude in an order of ten micrometres.…”
Section: Vibration Assisted Microjet Machiningmentioning
confidence: 99%
“…There have been numerous reported works where ultrasonic vibration assistance is employed to improve the machining process. Vibration has also been used to assist microjet machining process [50,51] although the mechanisms beyond which the vibration affects the machining process and performance may be different from those in traditional machining where solid tools are used [52,53]. In a recent study at the authors' laboratory, ultrasonic vibration of 20 kHz was applied perpendicularly on the target material surface with the amplitude in an order of ten micrometres.…”
Section: Vibration Assisted Microjet Machiningmentioning
confidence: 99%
“…Under the effect of ultrasonic vibration, the polymer chains in the melt are forced to vibrate. The equation of melt vibration in the unit volume at the distance l to the ultrasonic vibration source can be expressed as : x()t=A0eξ0lcos()italicωt+ϕ,a()t=ω2A0eξ0lcos()italicωt+ϕ+π where A 0 e ‐ξ0l is the amplitude of ultrasonic vibration at the surface. The restoring force of the forced vibration unit under the effect of ultrasonic vibration can be obtained as: F=m0a=m0italicdx2italicdt2=m0ω2x where x is the vibration displacement, m 0 is the melt mass per unit volume, the negative sign describes that the direction of restoring force points toward the origin.…”
Section: Theoretical Modelsmentioning
confidence: 99%
“…Under the effect of ultrasonic vibration, the polymer chains in the melt are forced to vibrate. The equation of melt vibration in the unit volume at the distance l to the ultrasonic vibration source can be expressed as [37]:…”
Section: Entanglement-disentanglement Wall Slip Under Ultrasonic Vibrmentioning
confidence: 99%
“…As for Figure .2, L refers to perimeter of sluiceway (raceway) in formula (1), S refers to arc length between central lines of coarse and superfinishing oilstones and sluiceway contact point in formula (2), swinging times x of oilstone is in formula (3). Assumed that rotary speed of working piece is n, axial swinging frequency of oilstone is f and radius of sluiceway (raceway) is r. Respectively choose single mill grain on coarse and superfinishing oilstone, the movement track on processing surface can be referred to Diagram 2, in which the full line and dotted line are respectively the tracks of coarse grain and superfinishing grain.…”
Section: Combined Superfinishing Of Precision Bearing Racewaymentioning
confidence: 99%
“…Recently, studies on combined processing technique are common applied to other fields, for example, Micro-Machining Technology of ECM Combined Ultrasonic Vibration, Jet Electrochemical Machining and Laser Beam Machining, Magnetorheological Fininshing Technology. For hard nonmetal raw materials, micro-machining technology of ECM combined ultrasonic vibration is feasible advantageous; however, such technology is featured with low efficiency and great tool wearing [1][2]for flexible metal materials. Jet Electrochemical Machining and Laser Beam Machining is defective as it requires secondary casting, thus it is much more applicable to coarse machining including perforating [3]; Magnetorheological Fininshing Technology is advanced technically, however, the time-consuming process will result in cost increment [4].…”
Section: Introductionmentioning
confidence: 99%