Erasable Phase Change Disks with Super Resolution Capability by Pulse-Readout

A new laser lithography technique using the effect of optical superresolution can effectively reduce the exposed spot size on a photoresist layer, thus allowing disk mastering toward higher density using an existing light source and optics. A thin metallic mask layer deposited on the top of the photoresist layer is used to obtain a "below optical diffraction limit" linewidth on the photoresist layer. The feasibility of the laser lithography technique, as evaluated by simulation and experimental results, revealed that the linewidth on the photoresist layer could be shrunk by more than 50% of the diffraction limit of the optical system.

Section: Principle Of Optical Superresolutionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Optical Disk Mastering Using Optical Superresolution Technique

Shieh¹,

Tsai²,

Peng³

et al. 2001

“…The main functions of the dielectric layers were to prevent material diffusion and to control the cooling rate and reflection coefficient. 1,6) The aluminum (Al) layer functioned as a heat sink and a reflective layer.…”

Section: Principlementioning

confidence: 99%

“…In erasable phase change optical recording, we have reported that diffraction limitation can be circumvented by applying a super resolution technique. 1) Thus, the recording density can be significantly increased at a given laser wavelength and objective NA.…”

Section: Introductionmentioning

confidence: 99%

Effects of Aperture Wall on the Readout Signal of Erasable Thermal Phase Change Super Resolution (EPSR) Disks

Liu

Tien

et al. 1999

Self Cite

A "below-diffraction-limited" aperture within the readout spot for high-density recording can be achieved on erasable thermal phase change super resolution (EPSR) disks. Compared to the large aperture wall formed by the DC detection method, the small aperture wall formed by pulse readout can not only increase the signal amplitude, but also suppress readout noise when detecting the EPSR disks. The small aperture wall width generated by pulse readout in the EPSR disk resulted in an 8 dB higher in carrier-to-noise (CNR) than that by DC readout in the conventional single-recording-layer phase change disk when reading the below-diffraction-limited marks of 0.4 µm.

Synchronous Trigger Detection for Pulse Laser Readout on Super Resolution Erasable Optical Disks

Yin

Chen

Tai

et al. 2000

The laser pulse readout scheme is advantageous in reading thermal super resolution disks, but the light modulation on the RF signal confuses the detection channel. A synchronous trigger detection scheme, using the pulse laser trigger signal to pick up the desired signal, is proposed to suppress the adverse effects of the light modulation. A 5-dB increase of the signal on an magneto-optical super resolution center aperture detection disk by the synchronous detection system was demonstrated experimentally.