Equivalent networks for SAW interdigital transducers

Inagawa, Kiyoshi; Koshiba, Masanori

doi:10.1109/58.285476

Cited by 25 publications

(4 citation statements)

References 19 publications

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“…Kiyoshi Inagawa et al proposed an equivalent network to describe the analysis of IDTs. [32][33][34] They calculated the dispersion characteristics of resonators by finite element analysis and obtained parameters of equivalent network deducing the relationship between K , eff 2 G max and f c :…”

Section: Simulation and Discussionmentioning

confidence: 99%

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

Tong¹,

Liu²,

Zhou³

et al. 2022

Jpn. J. Appl. Phys.

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The effective electromechanical coupling coefficient (Keff^2) is one of the crucial parameters to evaluate the performance of resonators. However, the low effective electromechanical coupling coefficient Keff^2 limits the application of lamb wave resonators (LWRs) in filters. This work presents the impact of metallization rate on the Keff^2 of AlN Checker-mode resonators (CKMRs) by using the finite element analysis approach for the first time. Four types of piezoelectric effect excitation configurations are proposed with different electrode designs based on AlN CKMRs. The results show that CKMRs have the largest Keff^2 with the metallization rate of 0.25-0.31 for top electrode. Meanwhile, when the metallization rate of top electrode varies from 0.2 to 0.7, the Keff^2 of open CKMRs possess the most remarkable enhancement about 235% of CKMRs. By properly optimizing the electrode design, CKMRs exhibit potential in the commercial applications.

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Section: Simulation and Discussionmentioning

confidence: 99%

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

Tong¹,

Liu²,

Zhou³

et al. 2022

Jpn. J. Appl. Phys.

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show abstract

“…The penetration depth of these waves is in the range of a few acoustic wavelengths and does not depend on the entire thickness of the substrate. In a typical SAW design, interdigital transducer (IDT) electrodes [96,97] are fabricated on piezoelectric material where on the application of electric voltage, acoustic waves are generated that travel across the substrate surface. By covering these IDTs with suitable recognition layer, these devices can be used for chemical sensing.…”

Section: Acoustic Sensors Qcm Saw and Fbarsmentioning

confidence: 99%

An Overview of High Frequency Acoustic Sensors—QCMs, SAWs and FBARs—Chemical and Biochemical Applications

Mujahid

Afzal

Dickert

2019

Sensors

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Acoustic devices have found wide applications in chemical and biosensing fields owing to their high sensitivity, ruggedness, miniaturized design and integration ability with on-field electronic systems. One of the potential advantages of using these devices are their label-free detection mechanism since mass is the fundamental property of any target analyte which is monitored by these devices. Herein, we provide a concise overview of high frequency acoustic transducers such as quartz crystal microbalance (QCM), surface acoustic wave (SAW) and film bulk acoustic resonators (FBARs) to compare their working principles, resonance frequencies, selection of piezoelectric materials for their fabrication, temperature-frequency dependency and operation in the liquid phase. The selected sensor applications of these high frequency acoustic transducers are discussed primarily focusing on the two main sensing domains, i.e., biosensing for working in liquids and gas/vapor phase sensing. Furthermore, the sensor performance of high frequency acoustic transducers in selected cases is compared with well-established analytical tools such as liquid chromatography mass spectrometry (LC-MS), gas chromatographic (GC) analysis and enzyme-linked immunosorbent assay (ELISA) methods. Finally, a general comparison of these acoustic devices is conducted to discuss their strengths, limitations, and commercial adaptability thus, to select the most suitable transducer for a particular chemical/biochemical sensing domain.

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“…In practice, it is desirable that the above equivalent circuit parameters are determined empirically or theoretically [25] to match the electrical responses of the actual transducer and the equivalent circuit. The subcircuits for unelectroded and electroded sections are shown in Fig.…”

Section: B Model Implementationmentioning

confidence: 99%

Simulation of Surface Acoustic Wave Devices

2004

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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The Mason crossed-field circuit model is generalized to simulate apodized interdigital transducers without channel division. The apodized transducer model is based on the transmission line model, and the artificial transformer with different voltage and current coupling ratios is used to independently obtain the transfer function and radiation admittance. In addition, a heuristic expression for transformer current ratios is used to approximate the radiation admittance of apodized transducers. Through comparing with the multichannel model, this unichannel model is illustrated to successfully describe the frequency response of apodized interdigital transducers.

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Equivalent networks for SAW interdigital transducers

Cited by 25 publications

References 19 publications

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator

An Overview of High Frequency Acoustic Sensors—QCMs, SAWs and FBARs—Chemical and Biochemical Applications

Simulation of Surface Acoustic Wave Devices

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