“…Based on the lower pressure and temperature used, silicon, copper, nickel, stainless steel, and even polymer masters have been used as template material [85,86]. Among them, SU-8 photoresist has also been used as a master material through standard photolithography for embossing polymeric materials under conditions similar to the ones used with metal templates, and an aluminum coating can be applied to facilitate substrate demolding from the template [87].…”