2005
DOI: 10.1016/j.snb.2004.11.035
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Epoxy resins as stamps for hot embossing of microstructures and microfluidic channels

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Cited by 96 publications
(65 citation statements)
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“…Methods of fabricating micron to nanometer scale patterns in polymers include hot embossing [31] and nanoimprint lithography [32] respectively, where a master template is used to transfer the features onto the polymer by mechanical deformation at precise conditions of heat and pressure. Technologies such as polymer casting [33] and capillary force lithography [34] allow for the fabrication of high aspect ratio features in polymers and are therefore the techniques adopted in this work.…”
Section: Introductionmentioning
confidence: 99%
“…Methods of fabricating micron to nanometer scale patterns in polymers include hot embossing [31] and nanoimprint lithography [32] respectively, where a master template is used to transfer the features onto the polymer by mechanical deformation at precise conditions of heat and pressure. Technologies such as polymer casting [33] and capillary force lithography [34] allow for the fabrication of high aspect ratio features in polymers and are therefore the techniques adopted in this work.…”
Section: Introductionmentioning
confidence: 99%
“…Based on the lower pressure and temperature used, silicon, copper, nickel, stainless steel, and even polymer masters have been used as template material [85,86]. Among them, SU-8 photoresist has also been used as a master material through standard photolithography for embossing polymeric materials under conditions similar to the ones used with metal templates, and an aluminum coating can be applied to facilitate substrate demolding from the template [87].…”
Section: Hot Embossingmentioning
confidence: 99%
“…In addition, the much shorter flow distance and lower flow velocity from the substrate into the die cavities during hot embossing results in a lower residual stress in the mould component (Worgull, 2009). The first generation of microfluidic devices were based of silicon or glass, mainly in micro component manufacture in the microelectronics industry (Koerner et al, 2005). Polymeric materials received attention in the development of microfluidic devices after the 2000s, due to their lower cost, diverse availability of materials and the variety of processes available for device manufacturing.…”
Section: Introductionmentioning
confidence: 99%