Epitaxial Pb(Zr,Ti)O₃ Thin Films on Flexible Substrates

Abstract

It is well known that the piezoelectric properties of a thin film can be influenced by crystallographic texture. At the extreme case, epitaxial thin films can be deposited on single crystal substrates (with appropriate lattice matching) to effectively achieve a single crystal thin film. Here, the maximum advantage of orientation dependence is found. Typically this has required small, expensive single crystalline substrates. In the past 10 years, however, the technique of ion beam assisted deposition has been developed for applying a biaxially textured template to an arbitrary smooth surface. This has opened up a new realm of materials integration possibilities, with the prime example being high-temperature superconducting wires. Here, the same template is utilized for deposition of epitaxial Pb(Zr,Ti)O 3 thin films onto LaNiO 3 and La 0.7 Sr 0.3 MnO 3 -coated flexible substrates. Chemical solution deposition (CSD) is used to produce PZT thin films with very high (00l) orientation and excellent in-plane orientation. Macroscopic ferroelectric measurements depict very square hysteresis behavior, with high remnant polarization of~40 lC/cm 2 . Piezoresponse force microscopy and local hysteresis measurements were used to image the microscopic domain structure and to demonstrate the piezoelectric behavior in these materials.

Flexible ferroelectric element based on van der Waals heteroepitaxy

“…Perovskite lead zirconium titanate [Pb(Zr,Ti)O 3 ; PZT] ( 11 ) having large polarization, fast polarization switching, high Curie temperature, low coercive field, and a high piezoelectric coefficient, is probably the most explored system for these applications. The flexible version of polycrystalline PZT–based NVM has been demonstrated on Si ( 12 , 13 ), Pt foil ( 14 ), Cu foil ( 15 ), and Ni superalloy ribbons ( 16 ) or built on Si and then transferred on to flexible polymer substrates ( 17 , 18 ). It has long been postulated that single-crystalline functional oxides could resolve the critical issue of memory retention time in current technologies.…”

{001} Oriented piezoelectric films prepared by chemical solution deposition on Ni foils

“…Recently, Shelton et al reported the integration of strongly oriented PZT film on flexible metal alloy substrates with ion beam-assisted deposition (IBAD) MgO templates. 12 However, global piezoelectric responses such as d 33 and e 31,f have not been reported with highly oriented PZT film on base metal substrate.…”

Abrasive Tools and Bonding Systems

“…However, when applied to clay-based materials, Bowen [202], Hall and Insley [206] and Foster [207] express reservations in using them due to the coarseness of the clay particles, the high viscosity of molten feldspar [208,209], and the slow diffusion of alkali ions which tend to prevent equilibrium and homogeneity of the mass. Shelton [210] used equilibrium diagrams with success to correlate the properties of fired whiteware bodies to the amount of eutectic melt formed. Dietzel and Padurow [211] used phase diagrams in their discussion of quartz dissolution in porcelain.…”