Crystal Growth 2019
DOI: 10.5772/intechopen.82745
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Epitaxial Growth of Thin Films

Abstract: Epitaxial thin film heterostructures are critical for integrating multi-functionality on a chip and creating smart structures for next-generation solid-state devices. Here, we discuss the traditional lattice matching epitaxy (LME) for small lattice misfit and domain matching epitaxy (DME), which handles epitaxial growth across the misfit scale, where lattice misfit strain is predominant and can be relaxed completely, meaning that only the thermal and defect strains remain upon cooling. In low misfit systems, a… Show more

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Cited by 10 publications
(7 citation statements)
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“…Contrary to h-LuFeO 3 (001)//YSZ(100)), one variant of h-LuFeO 3 on YSZ(111) has the larger modulus of lattice mismatch (∼13%) than the other one (∼7%) (Figure 6b). The practice of epitaxial film growth shows that 13% is an extremely large lattice mismatch, 37 which would lead to anomalously high strain in films, and thus such variant should not form at all. Our calculations that are discussed below also indicate that only one variant of h-LuFeO 3 is possible on the YSZ(111) surface.…”
Section: Methodsmentioning
confidence: 99%
“…Contrary to h-LuFeO 3 (001)//YSZ(100)), one variant of h-LuFeO 3 on YSZ(111) has the larger modulus of lattice mismatch (∼13%) than the other one (∼7%) (Figure 6b). The practice of epitaxial film growth shows that 13% is an extremely large lattice mismatch, 37 which would lead to anomalously high strain in films, and thus such variant should not form at all. Our calculations that are discussed below also indicate that only one variant of h-LuFeO 3 is possible on the YSZ(111) surface.…”
Section: Methodsmentioning
confidence: 99%
“…The mixed zone (Figure 2d) is substantially flat and homogeneous, with some micrometer-sized defects. The overall impression is that the cracks observed on the surface in the hazy zone are due to some delamination, possibly driven also by the higher film thickness in this zone, as reported for other heterostructures [26,27]. Specifically, in the case of strongly bonded oxides [27], where dislocation formation and propagation steps are difficult, the thermal misfit stress gets more prominent.…”
Section: Optical Microscopymentioning
confidence: 71%
“…is somewhat high, yet permissible for the epitaxial growth [31]. It occurs that in the case of the synthesized nanoparticles Fe3O4 is being strongly compressed in the interface plane.…”
Section: Resultsmentioning
confidence: 98%