The effects of oxygen pressure during the growth of LaAlO3 on (001) SrTiO3, and of post-deposition annealing were investigated. While little influence on the structure was observed, the transport properties were found to depend on both growth pressure and annealing. For LaAlO3 layer thicknesses between 5 and 10 unit cells and growth pressures between 10 −4 and 10 −2 mbar, the LaAlO3/SrTiO3 interfaces displayed similar metallic behavior with a sharp transition to a superconducting state. At an oxygen pressure of 10 −6 mbar oxygen vacancies were clearly introduced and extended deep into the SrTiO3 crystal. These vacancies could be removed by post-deposition annealing in 0.2 bar of O2 at ∼ 530 • C. At a growth pressure of 10 −4 mbar, the electronic properties of samples with ultra-thin LaAlO3 layers (2 to 3 unit cells thick) were found to depend markedly on the post-annealing step.