Enhancing the Performance of MEMS Piezoresistive Pressure Sensor Using Germanium Nanowire

Premi, M. S. Godwin; Martin, Betty

doi:10.1016/j.mspro.2015.06.048

Cited by 17 publications

(4 citation statements)

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“…The traditional processing methods of piezoresistive pressure sensor are mainly divided into surface micromachining and bulk micromachining [6][7][8][9][10]. The surface micro-machining method with etching sacrifice layer to form pressure-sensitive structure is complicated, and it is difficult to accurately control the size of sensitive diaphragm through wet etching sacrifice layer, which affects the performance of the designed sensor [11].…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Cheng

Liang

et al. 2023

Phys. Scr.

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With the rapid development of key industries such as new energy vehicles, smart homes, smart phones and consumer grade drones, the demand for high performance miniature micro- pressure sensors is also growing promptly. At prssent, most of the pressure sensors of this type adopt a C-type structure, and the thickness of the sensitive diaphragm needs to be continuously thinned in order to improve the sensitivity of this type sensor, which leads to its sensitivity to etching errors and makes it difficult to ensure the linearity of the pressure sensor. Based on this, we designed a miniature micro-pressure half active Wheatstone bridge piezoresistive pressure sensor with C-type square diaphragm structure, whose area is reduced by shortening the number of leads and pads, through ion impantation on the surface of the diaphragm to create a piezoresistors, using deep reactive ion etching (DRIE) technology to release the pressure sensitive diaphragm with length of 460 μm × 460 μm, thinkness of 7.5 μm. The buried oxygen layer in the SOI(silicon on insulator) can play a role of stopping the etching, which assures the uniformity of the released sensitive diaphragm and the non-linear errors of the sensor while maintains its sensitivity. In this paper, the influence of piezoresistor position offset on the performance of the pressure sensor is analyzed by means of simulation, which improves the accuracy of the designed model and guarantees its performance parameters can meet the design indicators. Finally, the static characteristics of the sensor is calibrated. The experimental results show that the sensitivity of the sensor is up to 0.538 mV kPa-1/3.5 V in the range of 40 kPa at room temperature, and the non-linear error is only 0.386 % FS. This study provides some new ideas and references for the design work of high performance micro-pressure sensors.

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Section: Introductionmentioning

confidence: 99%

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Cheng

Liang

et al. 2023

Phys. Scr.

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“…Several materials have been selected and proposed to make diaphragmbased pressure sensors including polycrystalline silicon [10], Graphene [11], SOI substrate with Oxygen ion implantation [12] Germanium [13], Parylene [14], [15], Silicon nanowires [16] and each material and proposed structure has its own advantages and drawbacks.…”

Section: Introductionmentioning

confidence: 99%

Influence of Corrugation Size and Location on Sensitivity Enhancement for MEMS-Based Pressure Sensor

Moosavian¹,

Borzuei²,

Farajollahi³

et al. 2022

JMechE

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In this paper, a MEMS capacitive diaphragm-based pressure sensor is investigated. The main focus of this work is to analyze the effect of the geometry and configuration on the sensitivity of a sensor as a crucial parameter in sensor design. Finite element modelling using ABAQUS software is conducted to simulate the behaviour of the diaphragm with different geometries under the same condition. Three popular geometries including square, rectangular and circular shapes with similar areas are investigated and sensitivities of 0.3, 0.24, and 0.22 µm/MPa were obtained for circular, square, and rectangular shapes respectively. Corrugated structure is added to circular diaphragm and deflection and stress analysis are provided for various positions and wave radius of the corrugated region and the best configuration based on sensitivity analysis is proposed. Simulation proved the 17.62% improvement in sensitivity by using a corrugated structure in a circular diaphragm with a small wave radius at the circumference of the circle. An increasing number of corrugated wave regions was also simulated but could not enhance the sensitivity in comparison with a one-wave corrugated structure.

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“…Pressure sensors based upon different transduction techniques including piezoresistive (Mosser et al 1991;Aryafar et al 2015;Shaby et al 2015;Rajavelu et al 2014) (using the change in the resistance to detect strain in diaphragm-embedded strain gauges due to applied pressure), capacitive (Palasagaram and Ramadoss 2006;Rochus et al 2016; Molla-Alipour and Ganji 2015; Sundararajan and Hasan 2014;Lei et al 2012) (using the diaphragm deflection due to applied pressure/or pressure difference in the cavity to create a variable capacitor), resonance (Petersen et al 1991;Burns et al 1994;Burns et al 1995) (measuring the change in resonance frequency of edge clamped plate/bridge due to the applied pressure), piezoelectric (Eaton and Smith 1997;Koal 1985;) (measuring the influence of the pressure on the charge in certain materials, such as quartz, III-V compound semiconductors and others), optical (Wagner et al 1993;Dziuban et al 1992;Wagner et al 1994) (using Mach-Zehnder interferometry for measuring pressure induced deflection) and thermal (Haberli et al 1996) (measuring the heat transfer across an air gap between source and sink based upon applied pressure) have been developed. Among these, most of the pressure sensor designs incorporate a membrane or diaphragm (as depicted in Fig.…”

Section: Introductionmentioning

confidence: 99%

Material selection for optimum design of MEMS pressure sensors

2019

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Choice of the most suitable material out of the universe of engineering materials available to the designers is a complex task. It often requires a compromise, involving conflicts between different design objectives. Materials selection for optimum design of a Micro-Electro-Mechanical-Systems (MEMS) pressure sensor is one such case. For optimum performance, simultaneous maximization of deflection of a MEMS pressure sensor diaphragm and maximization of its resonance frequency are two key but totally conflicting requirements. Another limitation in material selection of MEMS/ Microsystems is the lack of availability of data containing accurate micro-scale properties of MEMS materials. This paper therefore, presents a material selection case study addressing these two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby's method. First, data pertaining to micro-scale properties of MEMS materials has been consolidated and then the Performance and Material Indices that address the MEMS pressure sensor's conflicting design requirements are formulated. Subsequently, by using the micro-scale materials properties data, candidate materials for optimum performance of MEMS pressure sensors have been determined. Manufacturability of pressure sensor diaphragm using the candidate materials, pointed out by this study, has been discussed with reference to the reported devices. Supported by the previous literature, our analysis re-emphasizes that silicon with 110 crystal orientation [Si (110)], which has been extensively used in a number of micro-scale devices and applications, is also a promising material for MEMS pressure sensor diaphragm. This paper hence identifies an unexplored opportunity to use Si (110) diaphragm to improve the performance of diaphragm based MEMS pressure sensors.

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Enhancing the Performance of MEMS Piezoresistive Pressure Sensor Using Germanium Nanowire

Cited by 17 publications

References 1 publication

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Design and fabrication of a tiny micro-pressure sensor with improved linearity and sensitivity

Influence of Corrugation Size and Location on Sensitivity Enhancement for MEMS-Based Pressure Sensor

Material selection for optimum design of MEMS pressure sensors

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