2014
DOI: 10.1088/1674-1056/23/1/018502
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Enhancing light extraction of GaN-based blue light-emitting diodes by a tuned nanopillar array

Abstract: Enhancing light extraction of GaN-based blue light-emitting diodes by a tuned nanopillar array * Chen Zhan-Xu(陈湛旭) a)b) , Ren Yuan(任 远) a) , Xiao Guo-Hui(肖国辉) a) , Li Jun-Tao(李俊韬) a) , Chen Xia(陈 夏) a) , Wang Xue-Hua(王雪华) a) , Jin Chong-Jun(金崇君) a) † , and Zhang Bai-Jun(张佰君) a) a) State

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Cited by 9 publications
(4 citation statements)
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“…Firstly, an ordered monolayer of polystyrene (PS) spheres with 450 nm in diameter was formed on the undoped GaN layer. [23,24] Secondly, in order to prepare the arrays of larger nanoparticles or nanohole arrays, the sizes of nanospheres were tailored by reactive-ion etching (RIE) with oxygen plasma, prior to deposition of the silver. The nanospheres could be etched to a smaller diameter, while maintaining the position of the sphere in the crystalline lattice.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Firstly, an ordered monolayer of polystyrene (PS) spheres with 450 nm in diameter was formed on the undoped GaN layer. [23,24] Secondly, in order to prepare the arrays of larger nanoparticles or nanohole arrays, the sizes of nanospheres were tailored by reactive-ion etching (RIE) with oxygen plasma, prior to deposition of the silver. The nanospheres could be etched to a smaller diameter, while maintaining the position of the sphere in the crystalline lattice.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Tsai et al [18] have fabricated embedded PhCs within the GaN/InGaN green LEDs to enhance the LEE of LEDs by 78%, and meanwhile, the view angle of LEDs has also been collimated from 131.5 • to 114.0 • . Chen et al [19] have used nano-pillar array to improve the LEE of GaN-based blue LEDs and achieved a factor of 1.41 enhancement at 20 mA current injection. However, these methods were all aiming at a single wavelength extraction which had little effect on the LEE enhancement of other wavelengths.…”
Section: Introductionmentioning
confidence: 99%
“…Comparing to the silica nanosphere, the size of polystyrene (PS) nanosphere will be decreased with increasing the etching time as an etching mask. Through the PS NSL method, nanopillars with different diameters can be obtained and the LEE of LEDs can be optimized [23]. In addition, the nanopillar structure will take the characteristic of small top and big bottom, and this is helpful for the light to escape due to the gradient refractive index.…”
Section: Introductionmentioning
confidence: 99%