2021
DOI: 10.3389/fmats.2021.672128
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Enhancement of Responsivity in Solar-Blind UV Detector With Back-Gate MOS Structure Fabricated on β-Ga2O3 Films

Abstract: Monoclinic Ga2O3 (β-Ga2O3) films were grown on Si/SiO2 by using MOCVD. Then, we fabricated the solar-blind photodetector with a back-gate MOS structure. The device exhibited obvious photoresponse under 254-nm UV light illumination, and the photocurrent increased by five orders of magnitude, which could be controlled by VGS. The current generated under dark conditions could also be regulated by VGS and tended to constant when the regulation of VGS was reaching saturation. Meanwhile, VGS was confirmed to have a … Show more

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Cited by 6 publications
(4 citation statements)
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References 20 publications
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“…The dark current of the device with Al electrodes even drops by two orders of magnitude to 4.3 × 10 −14 A, which is lower than the dark current of many reported high-performance PDs. [27][28][29] As shown in Fig. 5(c), Au and Al electrodes reduce the t rise from 301 to 87 ms and 131 ms, respectively, compared to the Ti electrode.…”
mentioning
confidence: 76%
“…The dark current of the device with Al electrodes even drops by two orders of magnitude to 4.3 × 10 −14 A, which is lower than the dark current of many reported high-performance PDs. [27][28][29] As shown in Fig. 5(c), Au and Al electrodes reduce the t rise from 301 to 87 ms and 131 ms, respectively, compared to the Ti electrode.…”
mentioning
confidence: 76%
“…Accordingly, ultraviolet detectors have gained great importance for monitoring the environment and also in the military fields [19]. Many wide band gap nanomaterials including TiO 2 [20], NiO [21], SnO 2 [22], MoS [23], ZnTe [24], ZnSe [25,26], ZnO [27], SiC [28] and Nb 2 O 5 [29] has been used as a detectors for UV radiation. Among these materials Zinc oxide has proven, through many studies over a long period, its high efficiency in detecting ultraviolet radiation.…”
Section: Introductionmentioning
confidence: 99%
“…, α, β, γ, δ, ε, amorphous, and polycrystalline, 16 and the most stable phase, β-Ga 2 O 3 , has received considerable research interest. 17–21 However, the performance of β-Ga 2 O 3 -based photodetectors significantly depends on the quality of β-Ga 2 O 3 . Moreover, the preparation of crystalline β-Ga 2 O 3 requires a high-temperature.…”
Section: Introductionmentioning
confidence: 99%