Enhancement of piezo-related properties of AlN through combinatorial AlN–TiN nanocolumn composite composition spread

A novel design that utilizes aluminum nitride (AlN) piezoelectric thin films deposited on vertical surfaces for lateral motion and sensing is a step toward emerging multi-axial microelectromechanical systems (MEMS). This work demonstrates the fabrication process and potential applications of an in-plane moving piezoactuator. The actuator is excited using the inverse piezoelectric effect of the AlN thin film grown on the vertical surfaces of a Si cantilever. Lateral motion of the actuator is enabled when a voltage is applied between the top and bottom electrodes of the device, which are highly doped Si and titanium nitride thin film. The motion of the actuator is captured using scanning electron microscope.

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In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS

Bespalova

Nieminen

Gabrelian

et al. 2023

Adv Elect Materials

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The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System

Chen

Chu

et al. 2020

IEEE Trans. Electron Devices

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Enhancement of piezo-related properties of AlN through combinatorial AlN–TiN nanocolumn composite composition spread

Cited by 2 publications

References 26 publications

In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS

In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS

The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System

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