2012
DOI: 10.1143/jjap.51.090108
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Enhancement of Diamond Nucleation by Atomic Silicon Microaddition

Abstract: The enhancement of diamond nucleation by atomic silicon microaddition is demonstrated. From the observation by surface-enhanced Raman scattering (SERS), the mechanism of bias-enhanced nucleation (BEN) with atomic silicon microaddition is discussed. We propose two nucleation processes, namely, i) generation in condensed amorphous carbon (a-C) and ii) carbon cohesion with the adsorbed silicon atom as the core. It is shown that the nucleation process ii) induces highly oriented diamond growth on Si substrates. #

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Cited by 3 publications
(2 citation statements)
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“…Two-step diamond growth on Si (100) substrate was performed by microwave-plasma-assisted chemical vapor deposition (MP-CVD) using CH4, H2 as source gases. The first process is highly oriented diamond nucleation using the bias enhanced nucleation method with atomic Si micro addition [3,4]. Mono-methyl silane (MMS: Si(CH3)H3) was used as an atomic silicon source.…”
Section: Methodsmentioning
confidence: 99%
“…Two-step diamond growth on Si (100) substrate was performed by microwave-plasma-assisted chemical vapor deposition (MP-CVD) using CH4, H2 as source gases. The first process is highly oriented diamond nucleation using the bias enhanced nucleation method with atomic Si micro addition [3,4]. Mono-methyl silane (MMS: Si(CH3)H3) was used as an atomic silicon source.…”
Section: Methodsmentioning
confidence: 99%
“…The comparison of different sp 3 /sp 2 ratios is only accurate if the same excitation energy is used to acquire the spectra and if determined by the same method and mathematical expression. Several authors have used the ratio between the integral intensity of the diamond band (I diamond ) and the integral intensity of the G-band (I G ) (Isshiki et al, 2012). Others divide I diamond by the total integrated intensity of the Raman spectrum (I total ) (Salgueiredo et al, 2011;Štenclová et al, 2019).…”
Section: Presence Of Non-diamond Carbonmentioning
confidence: 99%