2007 International Semiconductor Device Research Symposium 2007
DOI: 10.1109/isdrs.2007.4422367
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Enhancement of critical dimension of wet-etched thick insulator holes in triode CNT-FED devices

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“…Martínez-Pérez). ments by CNTs incorporation remain modest with regard to what should be expected from a nanometer-scale reinforcement [9,10]. Biosensors are another field where CNTs-CH have found application due to carbon nanotubes, the molecular scale wires with high electrical conductivity, high chemical stability [11].…”
Section: Introductionmentioning
confidence: 99%
“…Martínez-Pérez). ments by CNTs incorporation remain modest with regard to what should be expected from a nanometer-scale reinforcement [9,10]. Biosensors are another field where CNTs-CH have found application due to carbon nanotubes, the molecular scale wires with high electrical conductivity, high chemical stability [11].…”
Section: Introductionmentioning
confidence: 99%