Abstract:Electrical scanning probe microscopes, such as the scanning capacitance microscope (SCM) for two dimensional dopant profiling, scanning Kelvin force microscope (SKFM) for surface potential measurements, and tunneling atomic force microscope (TUNA) for dielectric integrity measurements, are important tools for characterizing CMOS and nanoelectronic devices. A significant limitation of all these techniques is the terminal tip radius and the cone angle of the shank of the tip, which contribute substantial stray c… Show more
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