Enhanced performance of solar cell with n+ emitter by SiO2 nanospheres assisted liquid phosphorus diffusion

Surface modifications by wet oxidation method removing getter layer in crystalline silicon cells

“…3,11 The PRL as a getter layer is difficult to remove and is insoluble in neither water nor KOH and HF, is and called a dead layer. 12 Therefore, at the end of the PDG process, excess O 2 is used to oxidize PRL to phosphorus silicate glass (PSG). The PSG and impurities "captured" in it can be removed with the HF solution.…”