Abstract:We report a subnanoscale displacement resolution optical coherence vibration tomography (SOCVT) system for real time calibration of piezoelectric actuators. The calibrations of the actuators at nanoscale or microscale displacement ranges were performed by varying the input voltage over the entire range in the ascending and descending directions. The computational and experimental results demonstrated that the developed SOCVT could be used to characterize the dynamic hysteretic behaviour, nonlinear effect, and … Show more
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