2021
DOI: 10.1073/pnas.2021768118
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Enhanced cavity coupling to silicon vacancies in 4H silicon carbide using laser irradiation and thermal annealing

Abstract: The negatively charged silicon monovacancy VSi− in 4H silicon carbide (SiC) is a spin-active point defect that has the potential to act as a qubit in solid-state quantum information applications. Photonic crystal cavities (PCCs) can augment the optical emission of the VSi−, yet fine-tuning the defect–cavity interaction remains challenging. We report on two postfabrication processes that result in enhancement of the V1′ optical emission from our PCCs, an indication of improved coupling between the cavity and en… Show more

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Cited by 24 publications
(10 citation statements)
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“…The PhC cavity with a = 270 nm exhibits a Q-factor of 2.8 × 10 3 , while the PhC cavity with a = 290 nm exhibits a much higher Q-factor of 6.2 × 10 3 . The high Q-factor of 6.2 × 10 3 obtained in our work is on a par with the previously reported nanobeam cavities fabricated with bulk 4H-SiC material [19,31] .…”
Section: B)-2(d)supporting
confidence: 87%
“…The PhC cavity with a = 270 nm exhibits a Q-factor of 2.8 × 10 3 , while the PhC cavity with a = 290 nm exhibits a much higher Q-factor of 6.2 × 10 3 . The high Q-factor of 6.2 × 10 3 obtained in our work is on a par with the previously reported nanobeam cavities fabricated with bulk 4H-SiC material [19,31] .…”
Section: B)-2(d)supporting
confidence: 87%
“…The 4H-SiC structure has been shown to have several defects and PL peaks in the band gap. The PL spectra in 4H-SiC originate from a combination of phonon-instigated electronic transitions caused by defects in SiC [9][10][11]. This observation of luminescence quenching is not evidence of electronic doping [12,13].…”
Section: Introductionmentioning
confidence: 83%
“…Embedding optically active point defects in nanophotonic structures with high quality factors is a promising path toward optimizing color center optical emission rates for quantum technologies [169,170,201]. However, the extreme sensitivity of both the color centers and cavity modes to the quality of the surrounding material leads to losses in spin-photon coupling efficiency in cavities with fabrication-related imperfections [165,167,169,183,184,[201][202][203]. Heteropolytypic SiC materials promise to meet the demand for superior device fabrication techniques by enabling new and less damaging polytype-selective wet etching protocols [138,182].…”
Section: Polytype-selective Etching For Quantum Photonicsmentioning
confidence: 99%