Engineering manipulation at nanoscale: further functional specifications

Mekid, Samir; Bashmal, Salem

doi:10.1108/jedt-09-2018-0165

Cited by 5 publications

(3 citation statements)

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“…reflector optical inspection. The review of the past nanomanipulators in patents [2] and published papers [3], [4] has revealed several types; standalone manipulators in different sizes e.g. large XY compliant [5], small manipulators housed inside transition electron microscopy (TEM) benefiting from its high-resolution imaging and analytic capability [6].…”

Section: Introductionmentioning

confidence: 99%

“…grippers, sprayers, nano-tweezers. The existing quantified capabilities in terms of degrees of freedom, precision of motion, associated operations needed by the applications, and technology limitations of performances were reviewed in [3], [4]. Comparison has been made based on criteria such as degrees of freedom, sub-micrometer resolution with positioning precision per axis, available controlled operations for manipulation and whether these are operated in open or closed environment.…”

Section: Introductionmentioning

confidence: 99%

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Integrated Nanomanipulator With In-Process Lithography Inspection

Mekid

2020

IEEE Access

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Nanomanipulation techniques are extensively in use not only to reveal more characteristics of nano, micro and mesoscopic phenomena but also to build functional nano-devices that can bridge components between two or more scales to diversify the functions. In this paper, a novel integrated and numerically controlled instrument for nanomanipulation, imaging, in-process inspection using lithography with AFM back-to-back probes and characterization of materials at nanoscale is presented. A feature of common datum to all operations to avoid accuracy degradation between references is set. Robotic arms secure nanometre accuracy in the manipulation. The variety of operations is supported by multiple endeffector tools, e.g. force and temperature measurement. Examples are discussed. The availability of such an instrument with integrated functions appeared to be extremely helpful in addressing various fundamental problems in science and engineering such as understanding, modelling and testing nano-machining process, biomimetic design, exact construction of nano-structure arrays, and inspection of devices with complex features.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Integrated Nanomanipulator With In-Process Lithography Inspection

Mekid

2020

IEEE Access

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“…Кроме того, развитие микротехники и нанотехники привело к необходимости в исследовании сил адгезии, как причины взаимного прилипания отдельных элементов микроэлектромеханических систем, нарушающих их работу [11]. Фактор прилипания, обусловленный силами адгезии, должен также учитываться в технике при использовании микро-и наноманипуляторов [12,13]. Адгезию можно изучать как один из механизмов трения качения.…”

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Device and Measuring Method the Moments of Rolling Resistance Forces on the Contact Spot

Dzhilavdari

Mekid

Ризноокая

2019

Prib. metody izmer.

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Currently, the study of rolling friction is one of the main directions in the study of the laws of contact interaction of solids. The complexity of solving the problems existing in this area is evidenced by the practically vast number of publications, the list of which is constantly growing.In this paper, attention is paid to studies of the moments of rolling resistance at displacements from the equilibrium position of a ball-shaped body that are substantially smaller than the size of the contact spot. The purpose of the present work is to describe the design of the single-contact pendulum device developed by the authors, in which the physical pendulum, resting on the flat surface of the body under study with only one ball, makes free small stable swings in a vertical plane, as well as in the description of a special measurement technique with high sensitivity and accuracy rolling resistance forces, including adhesion forces and frequency-independent forces of elastic deformations. It is assumed that the adhesion forces can exhibit both dissipative properties and elastic properties, while elastic forces are independent of the strain rate.The originality of the method of measuring rolling resistance in this paper consists in using the method of nonlinear approximation of the dependence of the amplitude and period of swing of the pendulum on time. The approximation is carried out on the basis of the proposed laws of amplitude decay and period variation, which differ from the usual exponential law.It is assumed that this approach allows one to evaluate the surface tension of a solid and evaluate the pressure of adhesion forces between the surfaces of the contacting bodies, as well as to establish an analytical form of the moment of rolling resistance. The curves of the dependence of the rolling resistance moment on the swing amplitude of the pendulum are constructed. Experiments were performed for the following pairs of contacting bodies: steel-steel, steel-glass, steel-electritechnical silicon. It was assumed that the pressure at the contact spot did not exceed the elastic limit.The developed single-ball pendulum device and the proposed measurement procedure open up new wide possibilities for studying the laws of mechanisms of rolling resistance under conditions of microand mesoscale displacements of a rolling body from a state of rest.

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