2021
DOI: 10.1038/s41377-021-00553-2
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Engineered tunneling layer with enhanced impact ionization for detection improvement in graphene/silicon heterojunction photodetectors

Abstract: Here, an engineered tunneling layer enhanced photocurrent multiplication through the impact ionization effect was proposed and experimentally demonstrated on the graphene/silicon heterojunction photodetectors. With considering the suitable band structure of the insulation material and their special defect states, an atomic layer deposition (ALD) prepared wide-bandgap insulating (WBI) layer of AlN was introduced into the interface of graphene/silicon heterojunction. The promoted tunneling process from this desi… Show more

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Cited by 40 publications
(24 citation statements)
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“…The main challenge is to carry out a precise reduction process (using different reducing agents or reduction conditions), with the possibility of controlling both the reduction degree (the OFGs’ content) and the selectivity of the key OFGs’ removal [ 11 , 33 ]. Moreover, when dealing with applications in different optoelectronic and energy conversion and electrochemical storage areas the other very important issue is that the reduction process must be compatible with on-chip integration [ 9 , 34 , 35 , 36 , 37 ].…”
Section: Introductionmentioning
confidence: 99%
“…The main challenge is to carry out a precise reduction process (using different reducing agents or reduction conditions), with the possibility of controlling both the reduction degree (the OFGs’ content) and the selectivity of the key OFGs’ removal [ 11 , 33 ]. Moreover, when dealing with applications in different optoelectronic and energy conversion and electrochemical storage areas the other very important issue is that the reduction process must be compatible with on-chip integration [ 9 , 34 , 35 , 36 , 37 ].…”
Section: Introductionmentioning
confidence: 99%
“…They cover several functions including photosensing, logic computing, memory, micro-supercapacitor, and logic-inmemory. Figure 22a-c shows an example of wafer-scale graphene/AlN/Si heterojunction photodetector arrays fabricated by Li et al [170] The photograph of the detector array wafer is shown in Figure 22a, with a single device displayed in the inset. Figure 22b presents the detailed structure of a typical single photodetector.…”
Section: Microscale and Nanoscale Device Integrationmentioning
confidence: 99%
“…Figure 22.Microscale or nanoscale integrated devices using wafer-scale 2D vdW layered materials. The photosensing array using wafer-scale 2D graphene/Si junctions, a) the photograph of the wafer with photodetector array, Inset (lower left) is a single photodetector; b) schematic of a single photodetector; c) the spectra-dependent photocurrent responsivity of different photodetectors at a bias of -10 V. Reproduced with permission [170]. Copyright 2021, Springer Nature.…”
mentioning
confidence: 99%
“…Due to the considerably good optical and electrical properties, graphene is known to hold a great promising potential in photoelectric devices, such as photodetectors, modulators, perfect absorbers, photovoltaics, photocatalysts, etc. [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18]. However, the absorption efficiency of 2.3% is too low for the efficient operation of graphene-based photoelectric devices.…”
Section: Introductionmentioning
confidence: 99%