Energy-efficient thermo-optic silicon phase shifter with well-balanced overall performance

Qiu, Huaqing; Liu, Yong; Luan, Chao; Kong, Deming; Guan, Xiaowei; Ding, Yunhong; Hu, Hao

doi:10.1364/ol.400230

Cited by 37 publications

(12 citation statements)

References 21 publications

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“…Therefore, the P π •τ product of the TOPS is about 88.57 mW/π•μs. In addition, a TOPS based on a densely distributed silicon spiral waveguide on an SOI platform has been experimentally demonstrated by Qiu et al [60] (see Fig. 14).…”

Section: Tops With a Folded Waveguidementioning

confidence: 99%

See 1 more Smart Citation

Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

Liu¹,

Feng²,

Tian³

et al. 2022

Front. Optoelectron.

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Silicon photonic platforms offer relevance to large markets in many applications, such as optical phased arrays, photonic neural networks, programmable photonic integrated circuits, and quantum computation devices. As one of the basic tuning devices, the thermo-optic phase shifter (TOPS) plays an important role in all these applications. A TOPS with the merits of easy fabrication, low power consumption, small thermal time constant, low insertion loss, small footprint, and low crosstalk, is needed to improve the performance and lower the cost of the above applications. To meet these demands, various TOPS have been proposed and experimentally demonstrated on different foundry platforms In this paper, we review the state-of-the-art of TOPS, including metal heater, doped silicon, silicide, with silicon substrate undercut for heat insulation, folded waveguide structure, and multi-pass waveguide structure. We further compare these TOPSs and propose the directions of the future developments on TOPS. Graphical abstract

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Section: Tops With a Folded Waveguidementioning

confidence: 99%

“…c Spectrum of the MZI with the electrical power varies from 0 to 6.0 mW. d Modulation bandwidth of the TOPS [60] in Fig. 17c, when the folded time of the waveguide is 2, the FOM 2 is smallest.…”

Section: Tops With a Folded Waveguidementioning

confidence: 99%

Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

Liu¹,

Feng²,

Tian³

et al. 2022

Front. Optoelectron.

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“…The power consumption can be significantly reduced by improving the design of the phase shifter, considering a thermo-optic phase shifter with a low power consumption of 3 mW/π was demonstrated. 60 Ultimately, ultralow power operations can be enabled using other phase modulation schemes, such as energy-efficient microelectro-mechanical systems (MEMS) phase shifters. 61 In the experiment, light is coupled into and out from the chip through two fiber arrays.…”

Section: ■ Experimental Resultsmentioning

confidence: 99%

“…The power consumption of the thermo-optic phase shifter is ∼76 mW/π, with a 2π shift voltage ( V 2π ) of ∼4.5 V. No obvious polarization dependency of the phase shifter is observed. The power consumption can be significantly reduced by improving the design of the phase shifter, considering a thermo-optic phase shifter with a low power consumption of 3 mW/π was demonstrated . Ultimately, ultralow power operations can be enabled using other phase modulation schemes, such as energy-efficient microelectro-mechanical systems (MEMS) phase shifters .…”

Section: Resultsmentioning

confidence: 99%

Ten-Port Unitary Optical Processor on a Silicon Photonic Chip

et al. 2021

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Unitary optical processors (UOPs) are task-specific computing units that can ultimately enable ultrafast and energy-efficient unitary matrix-vector multiplications based on the interference between coherent optical beams. The UOP using multiport directional couplers (MDCs) holds great promise in large-scale integration because of its unique robustness against fabrication errors. Here, we demonstrate a 10-port robust UOP on a silicon photonic chip, which is so far the largest-scale UOP using multiport directional couplers. We further show the unique flexibility of this architecture by demonstrating operations for both the transverse electric (TE) and the transverse magnetic (TM) polarizations, which has never been realized in previous UOPs. This flexible and robust architecture is suitable for various scenarios in deep learning, optical communication, and quantum information processing.

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“…Table 1 shows a comparison of the proposed schemes with the state-of-art phase shifters using metallic heaters demonstrated on a silicon platform in recent years [21][22][23][24]. The τ is the thermal time constant.…”

Section: Discussionmentioning

confidence: 99%

The Design of a Low-Loss, Fast-Response, Metal Thermo-Optic Phase Shifter Based on Coupled-Mode Theory

et al. 2022

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A thermo-optic phase shifter is of great importance in silicon photonics. However, it is difficult to simultaneously achieve a good performance in insertion loss and in response speed by using traditional thermal tuning through a metallic heater. In this paper, based on coupled-mode theory, we propose a method to place high-loss materials close to the optical waveguide while maintaining the low loss of the optical device, which ensures the low insertion loss (~0.78 dB) of the phase shifter. Additionally, thanks to the very short distance between the rib waveguide and the chromium (Cr) heater, the phase shifter exhibits a high response speed (1.15 μs in rise time and 2.18 μs in decay time) with a measured bandwidth (BW) of 186 kHz. Moreover, we further optimize the structure of phase shifters, leading to the reduction of π-shift power consumption from 25.1 mW to 13.6 mW. Our proposed phase shifters have great potential in large-scale silicon photonic integrated circuits.

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Energy-efficient thermo-optic silicon phase shifter with well-balanced overall performance

Cited by 37 publications

References 21 publications

Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

Thermo-optic phase shifters based on silicon-on-insulator platform: state-of-the-art and a review

Ten-Port Unitary Optical Processor on a Silicon Photonic Chip

The Design of a Low-Loss, Fast-Response, Metal Thermo-Optic Phase Shifter Based on Coupled-Mode Theory

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