Energy distribution of ions produced by excimer-laser ablation of solid and molten targets

Franghiadakis, Y.; Fotakis, C.; Tzanétakis, P.

doi:10.1007/s003390050911

Cited by 50 publications

(20 citation statements)

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“…Up to date, very few systematic studies are known on laser ablation of liquid metals. Some examples include comparison of ablation dynamics for metals in solid and liquid states [71][72][73], thermal modeling of molten gallium ablation to understand the causes of high energies of the expanding ablation products [74], experiments on imaging the laser ablation dynamics and the irradiated surface response [75,76], generation of hot electrons and X-rays under fs laser ablation of molten metals [77], and GaN film deposition by pulsed laser ablation of liquid gallium in a nitrogen atmosphere [78]. In [70], during multishot ns laser irradiation (IR and UV) of liquid metals in the presence of reactive ambient gases, a tower-like structure (called below "microtower") with the diameter somewhat exceeding the irradiation spot size was growing on the irradiated surface at an average rate of 3-20 μm per pulse.…”

Section: Role Of Plasma Chemistry: "Microtower" Growth Upon Ablation mentioning

confidence: 99%

Impacts of Ambient and Ablation Plasmas on Short- and Ultrashort-Pulse Laser Processing of Surfaces

et al. 2014

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Abstract:In spite of the fact that more than five decades have passed since the invention of laser, some topics of laser-matter interaction still remain incompletely studied. One of such topics is plasma impact on the overall phenomenon of the interaction and its particular OPEN ACCESSMicromachines 2014, 5 1345 features, including influence of the laser-excited plasma re-radiation, back flux of energetic plasma species, and massive material redeposition, on the surface quality and processing efficiency. In this paper, we analyze different plasma aspects, which go beyond a simple consideration of the well-known effect of plasma shielding of laser radiation. The following effects are considered: ambient gas ionization above the target on material processing with formation of a "plasma pipe"; back heating of the target by both laser-driven ambient and ablation plasmas through conductive and radiative heat transfer; plasma chemical effects on surface processing including microstructure growth on liquid metals; complicated dynamics of the ablation plasma flow interacting with an ambient gas that can result in substantial redeposition of material around the ablation spot. Together with a review summarizing our main to-date achievements and outlining research directions, we present new results underlining importance of laser plasma dynamics and photoionization of the gas environment upon laser processing of materials.

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Section: Role Of Plasma Chemistry: "Microtower" Growth Upon Ablation mentioning

confidence: 99%

Impacts of Ambient and Ablation Plasmas on Short- and Ultrashort-Pulse Laser Processing of Surfaces

et al. 2014

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“…In the proper ablation regime, ionized and neutral ablation products having kinetic energies in the range from less than one to a few hundred eV can be produced [4][5][6]. The variable kinetic energy can be used to study a variety of phenomena such as enhanced lowtemperature epitaxy and surface segregation/incorporation reactions.…”

Section: Epitaxy (Mbe) or Physical Vapor Deposition (Pvd) Mbe / Pvd mentioning

confidence: 99%

Film growth mechanisms in pulsed laser deposition

Aziz¹

2008

Appl. Phys. A

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This paper reviews our recent studies of the fundamentals of growth morphology evolution in Pulsed Laser Deposition in two prototypical growth modes: metal-on-insulator island growth and semiconductor homoepitaxy. By comparing morphology evolution for pulsed laser deposition and thermal deposition in the same dual-use chamber under identical thermal, background, and surface preparation conditions, and varying the kinetic energy by varying the laser fluence or using an inert background gas, we have isolated the effect of kinetic energy from that of flux pulsing in determining the differences between morphology evolution in these growth methods.In each growth mode analytical growth models and Kinetic Monte Carlo simulations for thermal deposition, modified to include kinetic energy effects, are successful at explaining much of what we observe experimentally.

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“…The simplicity and robustness of a RFA has resulted in their proliferation in numerous areas of charge particle diagnostics such as semiconductors 46,47 , electron beam detection [48][49][50] , gaseous ion detection 51,52 , heavy metal ion detection 53,54 , high current discharge systems 55,56 and large volume plasma experiments including fusion studies [56][57][58] . repeller voltages +V r while the outer two are grounded.…”

Section: B Retarding Field Analyzermentioning

confidence: 99%

Charge resolved electrostatic diagnostic of colliding copper laser plasma plumes

Yeates¹,

Fallon²,

Kennedy³

et al. 2011

Physics of Plasmas

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Energy distribution of ions produced by excimer-laser ablation of solid and molten targets

Cited by 50 publications

References 0 publications

Impacts of Ambient and Ablation Plasmas on Short- and Ultrashort-Pulse Laser Processing of Surfaces

Impacts of Ambient and Ablation Plasmas on Short- and Ultrashort-Pulse Laser Processing of Surfaces

Film growth mechanisms in pulsed laser deposition

Charge resolved electrostatic diagnostic of colliding copper laser plasma plumes

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