2018
DOI: 10.1016/j.rinp.2017.12.001
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Energy control of neutral oxygen particles passing through an aperture electrode

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Cited by 11 publications
(11 citation statements)
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“…Details of the apparatus of the NBO system have been described in our previous reports. [27][28][29] Aluminum-doped ZnO (AZO) top electrodes were patterned using a shadow mask with a diameter of 150 µm; the AZO was deposited in Ar ambient to achieve highly oxygen deficient conducting films. All fabrication processes were conducted at room temperature.…”
Section: Methodsmentioning
confidence: 99%
“…Details of the apparatus of the NBO system have been described in our previous reports. [27][28][29] Aluminum-doped ZnO (AZO) top electrodes were patterned using a shadow mask with a diameter of 150 µm; the AZO was deposited in Ar ambient to achieve highly oxygen deficient conducting films. All fabrication processes were conducted at room temperature.…”
Section: Methodsmentioning
confidence: 99%
“…A radiofrequency (RF) power supply can accurately control the etching rate of AlGaN in GaN-based HEMTs. 16,17 In this structure with 3-nm recess height, the recess etch rate in the NBE gate recess process is controlled to 5 nm/min, corresponding to RF bias power. 15 The electrical characteristics of both devices (with recessed and non-recessed gate) are extracted by solving a two-dimensional (2D) drift-diffusion model.…”
Section: Simulation Of Non-recessed and Recessed-gate Gan Hemts And Comparison With Experimental Datamentioning
confidence: 99%
“…Device switching and synaptic performances could be improved after neutral oxygen irradiation [267]; this technique is also known as neutral beam oxidation (NBO). NBO can neutralize oxygen plasma [312] by charge exchange collision. NBO helps enhance surface oxidation, increasing the amount of oxygen interstitial at the TE of the ZnO interface.…”
Section: G Zno Based Rram For Synaptic Applicationmentioning
confidence: 99%