End Effects in Interdigital Surface Wave Transducers

Hartmann, C.S.; Secrest, Bruce G.

doi:10.1109/ultsym.1972.196113

Cited by 51 publications

(7 citation statements)

References 1 publication

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“…4(a), and occur in odd-harmonic pairs. Figure 4(b) shows the corresponding harmonic coefficient results obtained by Hartmann and Secrest [5] using Fourier transform analysis.…”

Section: B Harmonic Response Of Split-electrode Idtmentioning

confidence: 99%

An empirical method for obtaining the harmonic response coefficients of a SAW interdigital transducer

Campbell

Edmonson²

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

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An empirical delta-function model is applied to obtain the harmonic response coefficients for solid-electrode, split-electrode, and "three-finger" surface acoustic wave (SAW) interdigital transducers (IDTs). Good agreement is obtained between harmonic coefficients and polarities obtained by other investigators who used rigorous analytical methods. In principle, this empirical modelemploying a complex summation of idealized transverse and longitudinal E-fields under, and between, adjacent electrodes -should be applicable to modeling the fundamental and harmonic responses of SAW and leaky-SAW IDTs.

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“…4(a), and occur in odd-harmonic pairs. Figure 4(b) shows the corresponding harmonic coefficient results obtained by Hartmann and Secrest [5] using Fourier transform analysis.…”

Section: B Harmonic Response Of Split-electrode Idtmentioning

confidence: 99%

An empirical method for obtaining the harmonic response coefficients of a SAW interdigital transducer

Campbell

Edmonson²

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

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“…Due to N being small, the end effects at the edge of IDT perturb the distribution of electric field, thus deteriorating the functionality of LWR [23]. Conversely, increasing N impairs the end effects, resulting in a promotion of the capability as well as a decrease in the impedance.…”

Section: Verification Of K 2 Eff and The Fommentioning

confidence: 99%

Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications

Liang

Zhang

et al. 2015

J. Micromech. Microeng.

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A design guideline for one-port aluminum nitride (AlN) Lamb wave resonators (LWRs) working at S0 mode with high performance is reported. A fabricated 252 MHz LWR, with an aperture of 200 μm, 12 fingers, and 1.5 μm thick AlN, is found to have a remarkably high figure of merit (FOM), which exhibits a high ratio of the resistance at parallel resonance (Rp) to the resistance at series resonance (Rs) of 1317 and a corresponding product of the effective coupling coefficient (k2eff) and quality factor (Q) exceeding 52. Consisting of such resonators, a 6-stage ladder filter with a low pass-band insertion loss (IL) of 4.5 dB and steep filter skirts is achieved, offering significant advantage of size savings.

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“…Despite being of limited scope for real device applications, the papers represent pioneering efforts in developing tools to model second-order effects in SAW devices. The works in [6]- [8], although treating 2-D fields only, have been conceptually very important. The concepts in [6] and [7] were subsequently extended in many ways in the early 1990s.…”

Section: A Brief Historical Remarksmentioning

confidence: 99%

3D electrostatic charge distribution on finitely thick busbars in micro-acoustic devices: combined regularization in the near- and far-field

Baghai-Wadji

2015

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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The original work for 3-D charge distributions in micro-acoustic devices has been manifestly extended to account for finitely thick busbars. The work has been initiated to create a platform for simulating the electric charge localization and field enhancement at the electrode/busbar gaps depending on the thickness of the metalization in submicrometer geometries. A recipe for the construction of relevant Green's functions has been provided. A universal function (UF) for setting up system matrices in the method-of-moments' implementations has been constructed. Universal functions (moments of Green's functions) are by construction highly smooth and easy to compute. This work also presents a comprehensive completion of earlier work. For the first time, the calculation of the UF for a 3-D problem has been presented in great detail, highlighting the underlying regularization techniques. It is shown that the singular Fourier-type integrals involved can be regularized simultaneously in the near- and far-field. The pinnacle of the work is the detailed demonstration of the property that Hadamard's finite part regularization naturally arises in the construction of UFs. Three lemmata facilitate the understanding of the underlying concepts.

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End Effects in Interdigital Surface Wave Transducers

Cited by 51 publications

References 1 publication

An empirical method for obtaining the harmonic response coefficients of a SAW interdigital transducer

An empirical method for obtaining the harmonic response coefficients of a SAW interdigital transducer

Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications

3D electrostatic charge distribution on finitely thick busbars in micro-acoustic devices: combined regularization in the near- and far-field

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