Abstract:The original work for 3-D charge distributions in micro-acoustic devices has been manifestly extended to account for finitely thick busbars. The work has been initiated to create a platform for simulating the electric charge localization and field enhancement at the electrode/busbar gaps depending on the thickness of the metalization in submicrometer geometries. A recipe for the construction of relevant Green's functions has been provided. A universal function (UF) for setting up system matrices in the method-… Show more
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