Encapsulation of integrated circuits in plastic microfluidic systems using hot embossing

Iyer, Vikram; Murali, Pramod; Paredes, Jacobo; Liepmann, Dorian; Boser, Bernhard E.

doi:10.1109/transducers.2015.7181302

Cited by 2 publications

(1 citation statement)

References 13 publications

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“…Lamination is especially suited for large-scale production of multilayer systems and has been utilized for the fabrication of different types of optical elements and devices. In addition to the encapsulation of optoelectronic devices such as organic light emitting diodes (OLED) 4 or integrated circuits in polymer packages, 5 lamination techniques were also used for high-throughput production of tactile sensors, 6 gigahertz waveguides, 7 and optical waveguides. 8 Current research in integrated optics and photonics focuses on the fabrication of embedded systems in thin polymer foils including waveguides as well as illumination and sensing elements.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing of embedded multimode waveguides by reactive lamination of cyclic olefin polymer and polymethylmethacrylate

Kelb

Rother²,

Schuler³

et al. 2016

Opt. Eng

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Abstract. We demonstrate the manufacturing of embedded multimode optical waveguides through linking of polymethylmethacrylate (PMMA) foils and cyclic olefin polymer (COP) filaments based on a lamination process. Since the two polymeric materials cannot be fused together through interdiffusion of polymer chains, we utilize a reactive lamination agent based on PMMA copolymers containing photoreactive 2-acryloyloxyanthraquinone units, which allows the creation of monolithic PMMA-COP substrates through C-H insertion reactions across the interface between the two materials. We elucidate the lamination process and evaluate the chemical link between filament and foils by carrying out extraction tests with a custom-built tensile testing machine. We also show attenuation measurements of the manufactured waveguides for different manufacturing parameters. The lamination process is in particular suited for large-scale and low-cost fabrication of board-level devices with optical waveguides or other micro-optical structures, e.g., optofluidic devices.

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