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1994
DOI: 10.1063/1.356498
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Emission studies of the plume produced during YBa2Cu3O7 film production by laser ablation

Abstract: The optical plume emissions produced on excimer laser ablation of a YBa2Cu3O7 target are reported and identified with the various atomic, ionic, and molecular species present. The spatial and temporal distribution of these emissions were studied as a function of the laser fluence and oxygen pressure. At the laser fluences used (4–6 J/cm2) some target material is ablated or evaporated directly in molecular form. In addition efficient formation of molecular oxides is observed at the contact front of the expandin… Show more

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Cited by 51 publications
(17 citation statements)
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“…2,4,32,33 As shown in Fig. 2 the intensity of the strongest Y, Y ϩ , Ba, Ba ϩ , and YO emission lines ͑defined by their areas͒ decreases when the distance d from the target increases.…”
Section: B Light Emission From the Plumementioning
confidence: 87%
“…2,4,32,33 As shown in Fig. 2 the intensity of the strongest Y, Y ϩ , Ba, Ba ϩ , and YO emission lines ͑defined by their areas͒ decreases when the distance d from the target increases.…”
Section: B Light Emission From the Plumementioning
confidence: 87%
“…Depending on the gas pressure, shock or drag models have been used to describe the plasma expansion process. 7,8,11,12 As a consequence, the film stoichiometry and material angular distribution are strongly dependent on both the gas pressure and nature. 5,6,8,13 On the other hand, although the material removal process is actually known to be dependent of the laser energy density, 4,14 its influence on the deposition process and film composition is not yet well understood.…”
Section: Introductionmentioning
confidence: 99%
“…Several works have pointed out that the plasma characteristics such as temperature, degree of ionization, electron density, nature, and kinetic energy and distribution of the species present depend on the laser energy density. 7,11,[14][15][16][17][18] Particularly, the increase of the kinetic energy of the plasma species influences the structure and/or composition of the growing film; either through bombardment effects, 19 or through preferential resputtering of some of the elements from the substrate as in the case of ferroelectrics deposited in vacuum. 20 These results thus suggest the existence of a strong correlation between the kinetic of the plasma species and the material distribution in the deposited films.…”
Section: Introductionmentioning
confidence: 99%
“…However, the ratio seems to stabilize at different values depending on the chosen laser fluence, making it challenging to determine precisely the number of pulses needed to fully strip the coating. Since the transition probabilities depend upon the excitation energy, it is likely that the applied laser fluence may influence the emission spectrum [22]. Consequently, the relative intensity ratios may vary depending upon the etching conditions.…”
Section: Plume Emission Spectroscopymentioning
confidence: 99%