Embedded nanotransducer for ultrahigh-frequency SAW utilizing AlN/diamond layered structure

Wang, L.; Chen, S.M.; Ning, Xi; Chen, Z.; Liu, J.T.; Zhang, J.Y.

doi:10.1109/isaf.2017.8000223

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“…There are many researchers studying the Rayleigh SAW of (002) AlN films on (111) diamond for application in high-velocity SAW substrates. (11)(12)(13)(14)(15)(16)(17)(18)(19)(20) Different orientations of piezoelectric films will form different acoustic properties. Recently, the Rayleigh SAW mode of (100) AlN films on (111) diamond with propagation along the z-axis has been studied and excellent SAW properties were exhibited.…”

Section: Introductionmentioning

confidence: 99%

High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices

Huang¹,

Wu²

2019

Sensors and Materials

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Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital transducer (IDT) electrodes and/or thin metal films were investigated theoretically. Those composite SAW substrates exhibited excellent SH SAW properties and have the potential for further application in biological and liquid SAW sensors.

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