AIN/Si Based SAW Resonators for Very High Sensitivity Temperature Sensors

Nicoloiu, Alexandra; Müller, A.; Zdru, I.; Vasilache, D.; Stan, George; Nastase, C.; Dumitru, V.; Dinescu, Adrian

doi:10.1109/ultsym.2018.8580167

Cited by 5 publications

(1 citation statement)

References 15 publications

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“…The values have been higher than other recently reported values for this material demonstrating the potential of ScAlN to become a leading material for SAW technology for a wide area of applications including temperature sensing. Future determinations of sensitivity (and TCF) for devices with smaller wavelengths are necessary because we expect, like in the case of other temperature sensors on other III‐nitride based thin layer, to have a significant increase of the TCF when the structure is more compact [24], beneficial for a temperature sensor behavior.…”

Section: Discussionmentioning

confidence: 99%

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

Nicoloiu,

Boldeiu,

Nastase

et al. 2024

IEEJ Transactions Elec Engng

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GHz operating single port SAW resonators have been manufactured on Sc0.3Al0.7N/Si substrate. The thickness of the ScAlN thin layer was 0.8 μm. Advanced nano‐lithographic techniques have been developed for devices manufacturing. Rayleigh and Sezawa modes have been evidenced on Sc0.3Al0.7N/Si structure. The targeted applications are temperature sensors for harsh environmental operations. The sensitivity and temperature coefficient of frequency (TCF) of the manufactured devices have been experimentally determined and analyzed. The mode shapes of the resonances that appear in the devices supported on Sc0.3Al0.7N/Si substrate were evidenced by finite element method (FEM) simulations. A technique that combines FEM with Coupling of Modes (COM) was used for the determination of the resonance frequencies. Simulations performed for the temperature dependence of the resonance frequency led to results close to the experimental ones for the Rayleigh mode as well as for the Sezawa mode for devices supported on Sc0.3Al0.7N/Si substrate. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

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Section: Discussionmentioning

confidence: 99%

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

Nicoloiu,

Boldeiu,

Nastase

et al. 2024

IEEJ Transactions Elec Engng

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Plasma-Assisted Epitaxy of Piezoelectric ScxAl1-xN Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

Greenslit

Cunha

Lad

2022

J. Electron. Mater.

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AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

Lv²,

Huang

et al. 2023

IEEE Sensors J.

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AIN/Si Based SAW Resonators for Very High Sensitivity Temperature Sensors

Cited by 5 publications

References 15 publications

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

Plasma-Assisted Epitaxy of Piezoelectric ScxAl1-xN Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

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AIN/Si Based SAW Resonators for Very High Sensitivity Temperature Sensors

Cited by 5 publications

References 15 publications

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc0.3Al0.7N/Si†

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc0.3Al0.7N/Si†

Plasma-Assisted Epitaxy of Piezoelectric ScxAl1-xN Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors

Contact Info

Product

Resources

About

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†

Experimental Analysis of Rayleigh and Sezawa Modes Resonance Frequencies in SAW Devices Manufactured on Sc₀.₃Al₀_.₇N/Si^†