J. Electron. Mater.
 2022
DOI: 10.1007/s11664-021-09425-2
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Plasma-Assisted Epitaxy of Piezoelectric ScxAl1-xN Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

Morton Greenslit
1
,
M. Pereira da Cunha
2
,
Robert J. Lad
3
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