2013 IEEE 19th International on-Line Testing Symposium (IOLTS) 2013
DOI: 10.1109/iolts.2013.6604061
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Embedded high-precision frequency-based capacitor measurement system

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Cited by 8 publications
(4 citation statements)
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“…In order to accurately evaluate the benefits of our proposed scheme on large memory arrays, BL and WL lengths have been modelled to mimic a 1 Mbyte array (made of 1024 WLs and 1024x8-bits BLs). As a BL is characterized by a parasitic capacitance distributed through its length, a 1 pF bit-line capacitance is used according to the targeted technology [21]. Additionally, parasitic resistances [22] distributed along BLs/WLs have been inserted, following the methodology developed in [23].…”
Section: A Simulation Setupmentioning
confidence: 99%
“…In order to accurately evaluate the benefits of our proposed scheme on large memory arrays, BL and WL lengths have been modelled to mimic a 1 Mbyte array (made of 1024 WLs and 1024x8-bits BLs). As a BL is characterized by a parasitic capacitance distributed through its length, a 1 pF bit-line capacitance is used according to the targeted technology [21]. Additionally, parasitic resistances [22] distributed along BLs/WLs have been inserted, following the methodology developed in [23].…”
Section: A Simulation Setupmentioning
confidence: 99%
“…In the scope of using prepared monitoring functions to enhance the responsiveness of the method, a previously developed oxide thickness measurement function is implemented [5]. It is composed of 200 logic gates, was developed and tested within a single test structure and occupies an area of 2100 m .…”
Section: B Standalone Capacitance Monitoring Functionmentioning
confidence: 99%
“…That's why the critical part composed of the ring oscillator and the selection mode is extracted for each topology. The accuracy of the monitoring function is largely influenced by the process variation [5]. Therefore Monte-Carlo post-layout simulations have been performed on the extracted functions.…”
Section: In-circuit Capacitance Monitoring Function Implementationmentioning
confidence: 99%
“…Another technique is based on an oscillating structure whose frequency is influenced by the measured capacitor. Unlike previously described techniques, this one does not require any analogical external measurement instrument, but a frequency metre [4]. A ring oscillator is composed of an odd number ( N ) of inverters which forms a circular chain (see Fig.…”
Section: Introductionmentioning
confidence: 99%