Ellipsometry of Thin Film Systems

Ohlı́dal, Ivan; Franta, Daniel

doi:10.1016/s0079-6638(00)80018-9

Cited by 68 publications

(43 citation statements)

References 129 publications

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“…In particular, S m is similar in nature to the autocorrelation length that traditionally characterizes the linear dimension of irregularities of rough surface, see e.g., § 6 in [9]. The formulas of reflectance coefficients for mirrors with rough surfaces requires such data [9,10], but for us S m itself is of primary importance.…”

Section: Details Of Simulationmentioning

confidence: 87%

Development of surface relief on polycrystalline metals due to sputtering

Voitsenya

Balden

Bardamid

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

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The characteristics of surface microrelief that appear in sputtering experiments with polycrystalline metals of various grain sizes have been studied. Specimens with grain sizes varying from 30 -70 nm in the case of crystallized amorphous alloys, to 1 -3 µm for technical tungsten grade and 10 -100 μm for recrystallized tungsten were investigated. A model is proposed for the development of roughness on polycrystalline metals which is based on the dependence of sputtering rate on crystal orientation. The results of the modeling are in good agreement with experiments showing that the length scale of roughness is much larger than the grain size. Voitsenya et al.Surface relief due to sputtering of polycrystalline metals

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Section: Details Of Simulationmentioning

confidence: 87%

Development of surface relief on polycrystalline metals due to sputtering

Voitsenya

Balden

Bardamid

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

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“…There are several methods to do this. One could be to use ultrasonic film measurement (see for example [38]) and the other would be ellipsometry (an optical technique for investigating the dielectric properties of thin films, see for example [39]). …”

Section: Discussion Of Modellingmentioning

confidence: 99%

Understanding the Friction Mechanisms Between the Human Finger and Flat Contacting Surfaces in Moist Conditions

et al. 2010

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Human hands sweat in different circumstances and the presence of sweat can alter the friction between the hand and contacting surface. It is therefore important to understand how hand moisture varies between people, during different activities and the effect of this on friction.In this study a survey of fingertip moisture was done. Friction tests were then carried out to investigate the effect of moisture.Moisture was added to the surface of the finger, the finger was soaked in water, and water was added to the counter-surface; the friction of the contact was then measured. It was found that the friction increased, up until a certain level of moisture and then decreased. The increase in friction has previously been explained by viscous shearing, water absorption and capillary adhesion. The results from the experiments enabled the mechanisms to be investigated analytically. This study found that water absorption is the principle mechanism responsible for the increase in friction, followed by capillary adhesion, although it was not conclusively proved that this contributes significantly. Both these mechanisms increase friction by increasing the area of contact and therefore adhesion. Viscous shearing in the liquid bridges has negligible effect. There are, however, many limitations in the modelling that need further exploration.

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“…Then, the amplitudes of the fields at each side of the multilayer are related by a 2 × 2 complex matrix M as , we shall call a multilayer transfer matrix [8], in the form…”

Section: Pacs Numbersmentioning

confidence: 99%

Simple trace criterion for classification of multilayers

Sánchez-Soto

Monzón²,

Yonte³

et al. 2001

Opt. Lett.

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The action of any lossless multilayer is described by a transfer matrix that can be factorized in terms of three basic matrices. We introduce a simple trace criterion that classifies multilayers in three classes with properties closely related with one (and only one) of these three basic matrices. PACS numbers:Any linear system with two input and two output channels can be described in terms of a 2 × 2 transfer matrix [1,2]. In many instances (e.g., in polarization optics [3]), we are interested in the transformation properties of quotients of variables rather than on the variables themselves. Then, the transfer matrix induces a bilinear transformation that represents the action of the system in the complex plane [4].For layered media the use of 2 × 2 matrix methods is standard, but the corresponding complex-plane representation is not a common tool. In fact, it has been recently established that for a lossless multilayer the transfer matrix is an element of the group SU(1,1) [5], which is the key for a deeper understanding of its behavior and simplifies exceedingly its description in terms of bilinear transformations.Moreover, as we have pointed out recently [6], the Iwasawa decomposition provides a remarkable factorization of the transfer matrix representing any multilayer (no matter how complicated it could be) as the product of three matrices of simple interpretation. At the geometrical level, such a decomposition translates directly into three actions that are the basic bricks from which any multilayer action is built.In this Letter we go one step further and show that the trace of the transfer matrix allows for a classification of multilayers in three disjoint classes with properties very close to those appearing in the Iwasawa decomposition.To maintain the discussion as self contained as possible we briefly summarize the essential ingredients of multilayer optics we shall need for our purposes. The configuration we consider is a stratified structure that consists of a stack of plane-parallel layers sandwiched between two semi-infinite ambient (a) and substrate (s) media, which we shall assume to be identical, since this is the common experimental case. Hereafter all the media are supposed to be lossless, homogeneous, and isotropic.We assume an incident monochromatic, linearly polarized plane wave from the ambient, which makes an angle θ 0 with the normal to the first interface and has amplitude E (+) a . The electric field is either in the plane of incidence (p polarization) or perpendicular to the plane of incidence (s polarization). We consider as well another plane wave of the same frequency and polarization, and with amplitude E (−) s , incident from the substrate at the same angle θ 0 [7].As a result of multiple reflections in all the interfaces, we have a backward-traveling plane wave in the ambient, denoted E (−) a , and a forward-traveling plane wave in the substrate, denoted E (+) s . It is useful to treat the field amplitudes as the vectorwhich applies to both ambient and substrate media. Then, ...

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Ellipsometry of Thin Film Systems

Cited by 68 publications

References 129 publications

Development of surface relief on polycrystalline metals due to sputtering

Development of surface relief on polycrystalline metals due to sputtering

Understanding the Friction Mechanisms Between the Human Finger and Flat Contacting Surfaces in Moist Conditions

Simple trace criterion for classification of multilayers

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